TY - JOUR
T1 - A Highly Sensitive Ammonia (NH3) Sensor Based on a Tungsten Trioxide (WO3) Thin Film Decorated with Evaporated Platinum (Pt) Nanoparticles
AU - Chang, Ching Hong
AU - Chou, Tzu Chieh
AU - Chen, Wei Cheng
AU - Niu, Jing Shiuan
AU - Lin, Kun Wei
AU - Cheng, Shiou Ying
AU - Liu, Wen Chau
N1 - Funding Information:
Manuscript received December 5, 2019; revised January 9, 2020; accepted January 20, 2020. Date of publication February 12, 2020; date of current version February 26, 2020. This work was supported under Contract MOST 108-221-E-006-045. The review of this article was arranged by Editor I. Kymissis. (Corresponding author: Wen-Chau Liu.) Ching-Hong Chang, Tzu-Chieh Chou, Wei-Cheng Chen, Jing-Shiuan Niu, and Wen-Chau Liu are with the Department of Electrical Engineering, Institute of Microelectronics, National Cheng-Kung University, Tainan 70101, Taiwan (e-mail: wcliu@mail.ncku.edu.tw).
Publisher Copyright:
© 1963-2012 IEEE.
PY - 2020/3
Y1 - 2020/3
N2 - An interesting ammonia (NH3) sensor based on a tungsten trioxide (WO3) thin film decorated with platinum (Pt) nanoparticles (NPs) is fabricated and demonstrated herein. Pt NPs are prepared by a rapid thermal evaporation (RTE) approach. The small size of these Pt NPs causes an increased surface area/volume ( SA/V) ratio and enhanced sensing performance. The experimental results indicate good properties, including a higher sensing response of 72.61 under 1000 ppm NH3/air gas, a lower optimum operating temperature of 225 °C, and a lower detecting limit (≤ 1 ppm NH3/air). The studied device also has the advantages of a simple structure, easy fabrication, relatively low cost, a wide concentration detection range, and stable sensing performance. In addition, a first-order differential (FOD) and shape-preserving piecewise cubic interpolation (SPPCI) algorithms are employed to effectively reduce the redundant results and recover the reduced data for wireless transmission application. Thus, the studied Pt NP/WO3 thin film-based device shows a promise for high-performance ammonia sensing applications.
AB - An interesting ammonia (NH3) sensor based on a tungsten trioxide (WO3) thin film decorated with platinum (Pt) nanoparticles (NPs) is fabricated and demonstrated herein. Pt NPs are prepared by a rapid thermal evaporation (RTE) approach. The small size of these Pt NPs causes an increased surface area/volume ( SA/V) ratio and enhanced sensing performance. The experimental results indicate good properties, including a higher sensing response of 72.61 under 1000 ppm NH3/air gas, a lower optimum operating temperature of 225 °C, and a lower detecting limit (≤ 1 ppm NH3/air). The studied device also has the advantages of a simple structure, easy fabrication, relatively low cost, a wide concentration detection range, and stable sensing performance. In addition, a first-order differential (FOD) and shape-preserving piecewise cubic interpolation (SPPCI) algorithms are employed to effectively reduce the redundant results and recover the reduced data for wireless transmission application. Thus, the studied Pt NP/WO3 thin film-based device shows a promise for high-performance ammonia sensing applications.
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U2 - 10.1109/TED.2020.2968838
DO - 10.1109/TED.2020.2968838
M3 - Article
AN - SCOPUS:85080889756
VL - 67
SP - 1176
EP - 1182
JO - IEEE Transactions on Electron Devices
JF - IEEE Transactions on Electron Devices
SN - 0018-9383
IS - 3
M1 - 8995803
ER -