A Highly Sensitive Ammonia (NH3) Sensor Based on a Tungsten Trioxide (WO3) Thin Film Decorated with Evaporated Platinum (Pt) Nanoparticles

Ching Hong Chang, Tzu Chieh Chou, Wei Cheng Chen, Jing Shiuan Niu, Kun Wei Lin, Shiou Ying Cheng, Wen Chau Liu

Research output: Contribution to journalArticle


An interesting ammonia (NH3) sensor based on a tungsten trioxide (WO3) thin film decorated with platinum (Pt) nanoparticles (NPs) is fabricated and demonstrated herein. Pt NPs are prepared by a rapid thermal evaporation (RTE) approach. The small size of these Pt NPs causes an increased surface area/volume ( SA/V) ratio and enhanced sensing performance. The experimental results indicate good properties, including a higher sensing response of 72.61 under 1000 ppm NH3/air gas, a lower optimum operating temperature of 225 °C, and a lower detecting limit (≤ 1 ppm NH3/air). The studied device also has the advantages of a simple structure, easy fabrication, relatively low cost, a wide concentration detection range, and stable sensing performance. In addition, a first-order differential (FOD) and shape-preserving piecewise cubic interpolation (SPPCI) algorithms are employed to effectively reduce the redundant results and recover the reduced data for wireless transmission application. Thus, the studied Pt NP/WO3 thin film-based device shows a promise for high-performance ammonia sensing applications.

Original languageEnglish
Article number8995803
Pages (from-to)1176-1182
Number of pages7
JournalIEEE Transactions on Electron Devices
Issue number3
Publication statusPublished - 2020 Mar


All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

Cite this