@inproceedings{74ec0bbd81f4487699624848e2b1a1fc,
title = "A low-power interface circuit for multi-sensor applications",
abstract = "This paper presents a low-power generic readout circuit for capacitive and resistive complementary metaloxide-semiconductor (CMOS) micro-electro-mechanical-system (MEMS) sensors. This readout architecture can be scaled to even more sensors to achieve chip area and power consumption efficient. An incremental sigma-delta analog-to-digital converter (ΣΔ ADC) is used for providing multiplexed digital output. A demonstration chip was implemented in a 0.18-μm CMOS MEMS process, which integrates a three-axis accelerometer, the readout circuit, and an ARM M0 microprocessor. The chip area is 3.5×2.5 mm2 and the interface circuit with ADC draw only 120 mA of current from a 1.8-V supply. A magneto-resistance-type three-axis magnetic sensor is manufactured via extra post processes. This chip is designed to demonstrate a monolithic virtual gyroscope, which is a popular solution for low-power and low-cost inertial applications.",
author = "Wu, \{Po Chang\} and Liu, \{Bin Da\} and Yeh, \{Chih Yuan\} and Chen, \{Sih Yu\} and Tsai, \{Hann Huei\} and Juang, \{Ying Zong\}",
year = "2015",
month = may,
day = "5",
doi = "10.1109/ISISS.2015.7102367",
language = "English",
series = "2nd IEEE International Symposium on Inertial Sensors and Systems, IEEE ISISS 2015 - Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2nd IEEE International Symposium on Inertial Sensors and Systems, IEEE ISISS 2015 - Proceedings",
address = "United States",
note = "2nd IEEE International Symposium on Inertial Sensors and Systems, IEEE ISISS 2015 ; Conference date: 23-03-2015 Through 26-03-2015",
}