A MEMS-based Impedance Pump Based on a Magnetic Diaphragm

Chia Yen Lee, Z. H. Chen, C. Y. Wen, Lung-Ming Fu, H. T. Chang, R. H. Ma

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In realizing Lab-on-a-Chip systems, micro pumps play an essential role in manipulating small, precise volumes of solution and driving them through the various components of the micro chip. The current study proposes a micro pump comprising four major components, namely a lower glass substrate containing a copper micro coil, a microchannel, an upper glass cover plate, and a PDMS-based magnetic diaphragm. A Co-Ni magnet is electroplated on the PDMS diaphragm with sufficient thickness to produce a magnetic force of the intensity required to achieve the required diaphragm deflection. When a current is passed through the micro coil, an electromagnetic force is established between the coil and the magnet on the diaphragm. The resulting deflection of the PDMS diaphragm creates an acoustic impedance mismatch within the microchannel, which results in a net flow. The performance of the micro pump is characterized experimentally. A deflection of 30 μm is obtained by supplying the micro coil with an input current of 0.6A, and results in a flow rate of 1.5 μl/sec when the PDMS membrane is driven by an actuating frequency of 240 Hz.

Original languageEnglish
Title of host publication13th International Conference on Biomedical Engineering - ICBME 2008
Pages794-798
Number of pages5
DOIs
Publication statusPublished - 2009 Dec 1
Event13th International Conference on Biomedical Engineering, ICBME 2008 - , Singapore
Duration: 2008 Dec 32008 Dec 6

Publication series

NameIFMBE Proceedings
Volume23
ISSN (Print)1680-0737

Other

Other13th International Conference on Biomedical Engineering, ICBME 2008
CountrySingapore
Period08-12-0308-12-06

Fingerprint

Diaphragms
MEMS
Pumps
Microchannels
Magnets
Glass
Lab-on-a-chip
Acoustic impedance
Copper
Flow rate
Membranes
Substrates

All Science Journal Classification (ASJC) codes

  • Bioengineering
  • Biomedical Engineering

Cite this

Lee, C. Y., Chen, Z. H., Wen, C. Y., Fu, L-M., Chang, H. T., & Ma, R. H. (2009). A MEMS-based Impedance Pump Based on a Magnetic Diaphragm. In 13th International Conference on Biomedical Engineering - ICBME 2008 (pp. 794-798). (IFMBE Proceedings; Vol. 23). https://doi.org/10.1007/978-3-540-92841-6_195
Lee, Chia Yen ; Chen, Z. H. ; Wen, C. Y. ; Fu, Lung-Ming ; Chang, H. T. ; Ma, R. H. / A MEMS-based Impedance Pump Based on a Magnetic Diaphragm. 13th International Conference on Biomedical Engineering - ICBME 2008. 2009. pp. 794-798 (IFMBE Proceedings).
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Lee, CY, Chen, ZH, Wen, CY, Fu, L-M, Chang, HT & Ma, RH 2009, A MEMS-based Impedance Pump Based on a Magnetic Diaphragm. in 13th International Conference on Biomedical Engineering - ICBME 2008. IFMBE Proceedings, vol. 23, pp. 794-798, 13th International Conference on Biomedical Engineering, ICBME 2008, Singapore, 08-12-03. https://doi.org/10.1007/978-3-540-92841-6_195

A MEMS-based Impedance Pump Based on a Magnetic Diaphragm. / Lee, Chia Yen; Chen, Z. H.; Wen, C. Y.; Fu, Lung-Ming; Chang, H. T.; Ma, R. H.

13th International Conference on Biomedical Engineering - ICBME 2008. 2009. p. 794-798 (IFMBE Proceedings; Vol. 23).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Lee CY, Chen ZH, Wen CY, Fu L-M, Chang HT, Ma RH. A MEMS-based Impedance Pump Based on a Magnetic Diaphragm. In 13th International Conference on Biomedical Engineering - ICBME 2008. 2009. p. 794-798. (IFMBE Proceedings). https://doi.org/10.1007/978-3-540-92841-6_195