A method integrating optimal algorithm and FEM on CMOS residual stress

W. C. Chuang; David T.W. Lin; Y. C. Hu; H. L. Lee; C. H. Cheng; P. Z. Chang; N. B. Quyen

doi:10.1017/jmech.2013.51

A method integrating optimal algorithm and FEM on CMOS residual stress

W. C. Chuang, David T.W. Lin, Y. C. Hu, H. L. Lee, C. H. Cheng, P. Z. Chang, N. B. Quyen

Research output: Contribution to journal › Article › peer-review

12 Citations (Scopus)

Abstract

Residual stress in MEMS is of inherent importance in various respects. This study proposes a specific method using ANSYS including the birth and death method and combined with the optimal method (SCGM) to reduce the residual stresses during the CMOS fabrication process. The suitable cooling temperature for decreasing the residual stress is proposed and available. It demonstrates that the suitable parameter on the fabrication can reduce the residual stress in MEMS devices without any extra manufacturing process or external apparatus. The proposed method can expand to simulate the realistic MEMS model effectively.

Original language	English
Pages (from-to)	123-128
Number of pages	6
Journal	Journal of Mechanics
Volume	30
Issue number	2
DOIs	https://doi.org/10.1017/jmech.2013.51
Publication status	Published - 2014 Apr

All Science Journal Classification (ASJC) codes

Condensed Matter Physics
Mechanical Engineering
Applied Mathematics

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AU - Chang, P. Z.

AU - Quyen, N. B.

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AB - Residual stress in MEMS is of inherent importance in various respects. This study proposes a specific method using ANSYS including the birth and death method and combined with the optimal method (SCGM) to reduce the residual stresses during the CMOS fabrication process. The suitable cooling temperature for decreasing the residual stress is proposed and available. It demonstrates that the suitable parameter on the fabrication can reduce the residual stress in MEMS devices without any extra manufacturing process or external apparatus. The proposed method can expand to simulate the realistic MEMS model effectively.

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A method integrating optimal algorithm and FEM on CMOS residual stress

Abstract

All Science Journal Classification (ASJC) codes

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