A micro gas sensor based on a WO 3 thin film for aromatic hydrocarbon detection

Chia Yen Lee, Yu Hou Su, Lung-Ming Fu, Joe Air Jiang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In the study, a novel gas sensor is presented for detection of aromatic hydrocarbons (benzene, toluene and xylene), consisting of a quartz substrate, Pt electrodes and a WO 3 thin film. Oxidation occurs on the heated WO 3 sensing layer as an aromatic hydrocarbon is present in the atmosphere, which causes a resistance variation of the WO 3 thin film. From the measured resistance change, the aromatic hydrocarbon concentration is then computed. It is found that the crystalline structure is more perfect as the as-sputtering substrate temperature is 300°C, the WO 3 thin film is annealed and the sputtering time is more than 6 hrs. At the optimal working temperature of 300°C, the experimental results show that the sensor has a rapid response time and a high degree of sensitivity for detection of benzene, toluene and xylene.

Original languageEnglish
Title of host publication2011 5th International Conference on Sensing Technology, ICST 2011
Pages311-314
Number of pages4
DOIs
Publication statusPublished - 2011 Dec 1
Event2011 5th International Conference on Sensing Technology, ICST 2011 - Palmerston North, New Zealand
Duration: 2011 Nov 282011 Dec 1

Publication series

NameProceedings of the International Conference on Sensing Technology, ICST
ISSN (Print)2156-8065
ISSN (Electronic)2156-8073

Other

Other2011 5th International Conference on Sensing Technology, ICST 2011
CountryNew Zealand
CityPalmerston North
Period11-11-2811-12-01

All Science Journal Classification (ASJC) codes

  • Artificial Intelligence
  • Computer Science Applications
  • Signal Processing
  • Electrical and Electronic Engineering

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