TY - GEN
T1 - A microfabricated water-immersible scanning mirror with a small form factor for handheld ultrasound and photoacoustic microscopy
AU - Xu, Song
AU - Huang, Chih Hsien
AU - Zou, Jun
N1 - Funding Information:
This work was supported in part by a grant from the National Science Foundation (IDBR-1255921) and a grant from the March of Dimes Foundation under Prematurity Research Center at the Washington University in St. Louis. The authors would like thank Prof. Lihong V. Wang and Dr. Konstantin Maslov for helpful discussions
Publisher Copyright:
© 2016 SPIE.
PY - 2016
Y1 - 2016
N2 - Micro scanning mirrors that can operate reliably under water is useful in both ultrasound and photoacoustic microscopic imaging, where fast scanning of focused high-frequency ultrasound beams is desired for pixel-by-pixel data acquisition. This paper reports the development of a new micro-fabricated water-immersible scanning mirror with a small form factor. It consists of an optically and acoustically reflective mirror plate, which is supported onto two flexible polymer hinges and driven by an integrated electromagnetic micro-actuator. It can achieve one-axis scanning of ±12.1° at a resonant frequency of 250Hz in air and 210Hz in water, respectively. By optimizing the design and enhancing the fabrication with high-precision optical 3D printing, the overall size of the scanning mirror module is less than 7 mm × 5 mm × 7 mm. The small form factor, large scanning angle, and high resonant frequency of the new water-immersible scanning mirror make it suitable for building compact handheld imaging probes for in-vivo high-speed and wide-field ultrasound and photoacoustic microscopy.
AB - Micro scanning mirrors that can operate reliably under water is useful in both ultrasound and photoacoustic microscopic imaging, where fast scanning of focused high-frequency ultrasound beams is desired for pixel-by-pixel data acquisition. This paper reports the development of a new micro-fabricated water-immersible scanning mirror with a small form factor. It consists of an optically and acoustically reflective mirror plate, which is supported onto two flexible polymer hinges and driven by an integrated electromagnetic micro-actuator. It can achieve one-axis scanning of ±12.1° at a resonant frequency of 250Hz in air and 210Hz in water, respectively. By optimizing the design and enhancing the fabrication with high-precision optical 3D printing, the overall size of the scanning mirror module is less than 7 mm × 5 mm × 7 mm. The small form factor, large scanning angle, and high resonant frequency of the new water-immersible scanning mirror make it suitable for building compact handheld imaging probes for in-vivo high-speed and wide-field ultrasound and photoacoustic microscopy.
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U2 - 10.1117/12.2211746
DO - 10.1117/12.2211746
M3 - Conference contribution
AN - SCOPUS:84987615840
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - MOEMS and Miniaturized Systems XV
A2 - Piyawattanametha, Wibool
A2 - Park, Yong-Hwa
PB - SPIE
T2 - MOEMS and Miniaturized Systems XV
Y2 - 15 February 2016 through 17 February 2016
ER -