A microfabricated water-immersible scanning mirror with a small form factor for handheld ultrasound and photoacoustic microscopy

Song Xu, Chih Hsien Huang, Jun Zou

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

Micro scanning mirrors that can operate reliably under water is useful in both ultrasound and photoacoustic microscopic imaging, where fast scanning of focused high-frequency ultrasound beams is desired for pixel-by-pixel data acquisition. This paper reports the development of a new micro-fabricated water-immersible scanning mirror with a small form factor. It consists of an optically and acoustically reflective mirror plate, which is supported onto two flexible polymer hinges and driven by an integrated electromagnetic micro-actuator. It can achieve one-axis scanning of ±12.1° at a resonant frequency of 250Hz in air and 210Hz in water, respectively. By optimizing the design and enhancing the fabrication with high-precision optical 3D printing, the overall size of the scanning mirror module is less than 7 mm × 5 mm × 7 mm. The small form factor, large scanning angle, and high resonant frequency of the new water-immersible scanning mirror make it suitable for building compact handheld imaging probes for in-vivo high-speed and wide-field ultrasound and photoacoustic microscopy.

Original languageEnglish
Title of host publicationMOEMS and Miniaturized Systems XV
EditorsWibool Piyawattanametha, Yong-Hwa Park
PublisherSPIE
ISBN (Electronic)9781628419955
DOIs
Publication statusPublished - 2016
EventMOEMS and Miniaturized Systems XV - San Francisco, United States
Duration: 2016 Feb 152016 Feb 17

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume9760
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Other

OtherMOEMS and Miniaturized Systems XV
Country/TerritoryUnited States
CitySan Francisco
Period16-02-1516-02-17

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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