TY - GEN
T1 - A microfabricated water-immersible scanning mirror with a small form factor for handheld ultrasound and photoacoustic microscopy
AU - Xu, Song
AU - Huang, Chih Hsien
AU - Zou, Jun
N1 - Publisher Copyright:
© 2016 SPIE.
PY - 2016
Y1 - 2016
N2 - Micro scanning mirrors that can operate reliably under water is useful in both ultrasound and photoacoustic microscopic imaging, where fast scanning of focused high-frequency ultrasound beams is desired for pixel-by-pixel data acquisition. This paper reports the development of a new micro-fabricated water-immersible scanning mirror with a small form factor. It consists of an optically and acoustically reflective mirror plate, which is supported onto two flexible polymer hinges and driven by an integrated electromagnetic micro-actuator. It can achieve one-axis scanning of ±12.1° at a resonant frequency of 250Hz in air and 210Hz in water, respectively. By optimizing the design and enhancing the fabrication with high-precision optical 3D printing, the overall size of the scanning mirror module is less than 7 mm × 5 mm × 7 mm. The small form factor, large scanning angle, and high resonant frequency of the new water-immersible scanning mirror make it suitable for building compact handheld imaging probes for in-vivo high-speed and wide-field ultrasound and photoacoustic microscopy.
AB - Micro scanning mirrors that can operate reliably under water is useful in both ultrasound and photoacoustic microscopic imaging, where fast scanning of focused high-frequency ultrasound beams is desired for pixel-by-pixel data acquisition. This paper reports the development of a new micro-fabricated water-immersible scanning mirror with a small form factor. It consists of an optically and acoustically reflective mirror plate, which is supported onto two flexible polymer hinges and driven by an integrated electromagnetic micro-actuator. It can achieve one-axis scanning of ±12.1° at a resonant frequency of 250Hz in air and 210Hz in water, respectively. By optimizing the design and enhancing the fabrication with high-precision optical 3D printing, the overall size of the scanning mirror module is less than 7 mm × 5 mm × 7 mm. The small form factor, large scanning angle, and high resonant frequency of the new water-immersible scanning mirror make it suitable for building compact handheld imaging probes for in-vivo high-speed and wide-field ultrasound and photoacoustic microscopy.
UR - http://www.scopus.com/inward/record.url?scp=84987615840&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84987615840&partnerID=8YFLogxK
U2 - 10.1117/12.2211746
DO - 10.1117/12.2211746
M3 - Conference contribution
AN - SCOPUS:84987615840
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - MOEMS and Miniaturized Systems XV
A2 - Piyawattanametha, Wibool
A2 - Park, Yong-Hwa
PB - SPIE
T2 - MOEMS and Miniaturized Systems XV
Y2 - 15 February 2016 through 17 February 2016
ER -