A new method for determining the strain energy release rate of an interface via force-depth data of nanoindentation tests

Pal Jen Wei, Wen Long Liang, Chi Fong Ai, Jen-Fin Lin

Research output: Contribution to journalArticlepeer-review

16 Citations (Scopus)

Abstract

Indentation forces, including constant rate and oscillating mode, were applied to SiO2/Si and diamond-like carbon (DLC)/Si specimens. A two-stage behavior was exhibited in the force-depth results after delamination occurred. When the depth was smaller than the threshold value, a linear load-depth relationship was exhibited because the debonded film was suspended over the substrate. Membrane theory was applied to analyze the deflection of the suspended film, and thus the in-plane stress exhibited in the debonded film was evaluated. Through the proposed method, the strain energy release rate of the interface can be directly evaluated by analyzing the force-depth data of the indentation tests.

Original languageEnglish
Article number025701
JournalNanotechnology
Volume20
Issue number2
DOIs
Publication statusPublished - 2009 Jan 14

All Science Journal Classification (ASJC) codes

  • Bioengineering
  • Chemistry(all)
  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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