A new shutter design with a modified effusion cell for use in an ultrahigh vacuum system

H. C. Lu, W. S. Chan, K. L. Wang

Research output: Contribution to journalArticlepeer-review

Abstract

A new, inexpensive, reliable, computer-controlled shutter has been designed with a modified effusion cell on the same flange for thermal evaporation in an ultrahigh vacuum system. Only 5 W are required to control the shutter open/close states with a response time of less than 0.1 s. The evaporation rate can be modulated by varying the speed of rotation of the shutter. Rotary action is obtained through a coupled magnetic field. Doping levels between maximum and minimum flux can be achieved. About 100 W are needed for 1000 °C operation. A functional modified effusion cell was constructed using an available standard pyrolytic boron nitride crucible(10 cc capacity). As an example of the capabilities of this shutter-controller system, a linear ramped profile was demonstrated.

Original languageEnglish
Pages (from-to)811-815
Number of pages5
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume8
Issue number2
DOIs
Publication statusPublished - 1990 Mar

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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