A new water-immersible two-axis MEMS scanning mirror for photoacoustic microscopy

Song Xu, Chih Hsien Huang, Jun Zou

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A new water-immersible two-axis MEMS scanning mirror has been designed, fabricated, and tested for both laser and ultrasound beam steering. The two scanning axes have very different resonance frequencies, which are suitable for raster scanning.

Original languageEnglish
Title of host publicationOptical Tomography and Spectroscopy, OTS 2016
PublisherOSA - The Optical Society
Number of pages1
ISBN (Print)9781943580101
Publication statusPublished - 2016 Apr 18
EventOptical Tomography and Spectroscopy, OTS 2016 - Fort Lauderdale, United States
Duration: 2016 Apr 252016 Apr 28

Publication series

NameOptics InfoBase Conference Papers

Other

OtherOptical Tomography and Spectroscopy, OTS 2016
CountryUnited States
CityFort Lauderdale
Period16-04-2516-04-28

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials

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  • Cite this

    Xu, S., Huang, C. H., & Zou, J. (2016). A new water-immersible two-axis MEMS scanning mirror for photoacoustic microscopy. In Optical Tomography and Spectroscopy, OTS 2016 (Optics InfoBase Conference Papers). OSA - The Optical Society.