A novel method for enabling the thermosonic wire bonding of gold wire onto chips with copper interconnects

Yeau-Ren Jeng, Chang Ming Wang, Sang Mao Chiu, Ching Yang Cheng

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

The wire bonding of chips with copper interconnects is a challenging issue. The present study develops a method in which the substrates are stored in a temperature and humidity controlled environment such that copper oxide films of appropriate thickness are formed on the substrate prior to the gold-copper thermosonic bonding process. It is shown that this film can be removed during the bonding process, hence rendering the wire bonding process feasible without the requirement for an inert gas environment or the use of metallic cap layers.

Original languageEnglish
Article number3
JournalElectrochemical and Solid-State Letters
Volume7
Issue number12
DOIs
Publication statusPublished - 2004 Dec 1

Fingerprint

Gold
Copper
chips
wire
Wire
gold
copper
Noble Gases
Copper oxides
copper oxides
Substrates
Inert gases
caps
Oxide films
oxide films
humidity
rare gases
Atmospheric humidity
requirements
Temperature

All Science Journal Classification (ASJC) codes

  • Chemical Engineering(all)
  • Materials Science(all)
  • Physical and Theoretical Chemistry
  • Electrochemistry
  • Electrical and Electronic Engineering

Cite this

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A novel method for enabling the thermosonic wire bonding of gold wire onto chips with copper interconnects. / Jeng, Yeau-Ren; Wang, Chang Ming; Chiu, Sang Mao; Cheng, Ching Yang.

In: Electrochemical and Solid-State Letters, Vol. 7, No. 12, 3, 01.12.2004.

Research output: Contribution to journalArticle

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AU - Wang, Chang Ming

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