TY - GEN
T1 - A novel microfabricated formaldehyde gas sensor with NiO thin film
AU - Lee, Chia Yen
AU - Chiang, Che Ming
AU - Chou, Po Cheng
AU - Fu, Lung Ming
AU - Lin, Che Hsin
PY - 2005
Y1 - 2005
N2 - This paper presents a novel microfabricated formaldehyde gas sensor with enhanced sensitivity and detection resolution capabilities. The device comprises a silica microstructure suspended at a small distance above a glass substrate. A sputtered NiO thin film is used as the formaldehyde sensing layer. The gas sensor incorporates Pt heating resistors integrated with a micro hotplate to provide a heating function and utilizes Au interdigitated electrodes. When formaldehyde is present in the atmosphere, it is adsorbed by the sensing layer and causes a change in the electrical conductivity of the NiO film. Therefore, the measured resistance between the interdigitated electrodes changes correspondingly. The application of a voltage to the Pt heaters causes the temperature of the micro hotplate to increase, which in turn enhances the sensitivity of the sensor. The nanometer scale grain size of the sputtered oxide thin film is conducive to improving the sensitivity of the gas sensor. The experimental results indicate that the developed device has a sensitivity of 10 ohm ppm-1 at 300°C and a detection capability of less than 1.0 ppm.
AB - This paper presents a novel microfabricated formaldehyde gas sensor with enhanced sensitivity and detection resolution capabilities. The device comprises a silica microstructure suspended at a small distance above a glass substrate. A sputtered NiO thin film is used as the formaldehyde sensing layer. The gas sensor incorporates Pt heating resistors integrated with a micro hotplate to provide a heating function and utilizes Au interdigitated electrodes. When formaldehyde is present in the atmosphere, it is adsorbed by the sensing layer and causes a change in the electrical conductivity of the NiO film. Therefore, the measured resistance between the interdigitated electrodes changes correspondingly. The application of a voltage to the Pt heaters causes the temperature of the micro hotplate to increase, which in turn enhances the sensitivity of the sensor. The nanometer scale grain size of the sputtered oxide thin film is conducive to improving the sensitivity of the gas sensor. The experimental results indicate that the developed device has a sensitivity of 10 ohm ppm-1 at 300°C and a detection capability of less than 1.0 ppm.
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U2 - 10.1109/SICON.2005.257859
DO - 10.1109/SICON.2005.257859
M3 - Conference contribution
AN - SCOPUS:36048972355
SN - 1424402980
SN - 9781424402984
T3 - Proceedings of the ISA/IEEE 2005 Sensors for Industry Conference, Sicon'05
SP - 1
EP - 5
BT - Proceedings of the ISA/IEEE 2005 Sensors for Industry Conference, Sicon'05
T2 - ISA/IEEE 2005 Sensors for Industry Conference, Sicon'05
Y2 - 8 February 2005 through 10 February 2005
ER -