TY - GEN
T1 - A novel semi-analytical approach for micro beams subjected to electrostatic loads and residual stress gradients
AU - Ou, Kuang Shun
AU - Chen, Kuo Shen
AU - Yang, Tian Shiang
AU - Lee, Sen Yung
PY - 2009
Y1 - 2009
N2 - Beam structures are widely used in MEMS sensors and actuators. MEMS micro beams are usually curled due to residual stresses and the characteristics of micro beams subjected to both residual stress gradients and electrostatic forces must be investigated for providing accuracy information for designing sensors and actuators. In this work, a novel semi-analytical formulation to address the above needs is proposed. By assuming an admissible deformation shape and utilizing energy method to determine the coefficients of the shape functions, it is possible to find the pull-in characteristics of the curled cantilevers. Detail parametric studies are subsequently performed to quantify the influence of various geometry and processing parameters on the pull-in characteristics of those micro beams. The method and results presented in this work would be very useful for related micro sensors and actuator designs.
AB - Beam structures are widely used in MEMS sensors and actuators. MEMS micro beams are usually curled due to residual stresses and the characteristics of micro beams subjected to both residual stress gradients and electrostatic forces must be investigated for providing accuracy information for designing sensors and actuators. In this work, a novel semi-analytical formulation to address the above needs is proposed. By assuming an admissible deformation shape and utilizing energy method to determine the coefficients of the shape functions, it is possible to find the pull-in characteristics of the curled cantilevers. Detail parametric studies are subsequently performed to quantify the influence of various geometry and processing parameters on the pull-in characteristics of those micro beams. The method and results presented in this work would be very useful for related micro sensors and actuator designs.
UR - http://www.scopus.com/inward/record.url?scp=79551610090&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=79551610090&partnerID=8YFLogxK
U2 - 10.1115/DETC2009-86977
DO - 10.1115/DETC2009-86977
M3 - Conference contribution
AN - SCOPUS:79551610090
SN - 9780791849033
T3 - Proceedings of the ASME Design Engineering Technical Conference
SP - 597
EP - 606
BT - ASME 2009 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2009
T2 - ASME 2009 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2009
Y2 - 30 August 2009 through 2 September 2009
ER -