A novel two-axis MEMS scanning mirror with a PZT actuator for laser scanning projection

Chung De Chen; Yu Jen Wang; Pin Chang

doi:10.1364/OE.20.027003

A novel two-axis MEMS scanning mirror with a PZT actuator for laser scanning projection

Chung De Chen, Yu Jen Wang, Pin Chang

Department of Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

33 Citations (Scopus)

Abstract

This study presents a novel design for a two-axis scanning device driven by lead-zirconate-titanate (PZT) ceramic. The proposed device consists of a scanning mirror and a Y-shaped piezoelectric actuator. The scanning mirror was fabricated using an MEMS process involving three masks. Experimental results show that the fast and slow frequencies at resonance are 25.0 kHz and 0.56 kHz, respectively. The optical scanning angles are 27.6° and 39.9°. The power consumption of the device is 13.4 mW at a driving voltage of 10 V. This study also develops a laser projection module integrated with the scanning device. The module can project a 2-D image at a resolution of 640 x 480.

Original language	English
Pages (from-to)	27003-27017
Number of pages	15
Journal	Optics Express
Volume	20
Issue number	24
DOIs	https://doi.org/10.1364/OE.20.027003
Publication status	Published - 2012 Nov 19

All Science Journal Classification (ASJC) codes

Atomic and Molecular Physics, and Optics

Access to Document

10.1364/OE.20.027003

Cite this

@article{9ce35d155bb64e318c2f66fde2aaf4b3,

title = "A novel two-axis MEMS scanning mirror with a PZT actuator for laser scanning projection",

abstract = "This study presents a novel design for a two-axis scanning device driven by lead-zirconate-titanate (PZT) ceramic. The proposed device consists of a scanning mirror and a Y-shaped piezoelectric actuator. The scanning mirror was fabricated using an MEMS process involving three masks. Experimental results show that the fast and slow frequencies at resonance are 25.0 kHz and 0.56 kHz, respectively. The optical scanning angles are 27.6° and 39.9°. The power consumption of the device is 13.4 mW at a driving voltage of 10 V. This study also develops a laser projection module integrated with the scanning device. The module can project a 2-D image at a resolution of 640 x 480.",

author = "Chen, {Chung De} and Wang, {Yu Jen} and Pin Chang",

year = "2012",

month = nov,

day = "19",

doi = "10.1364/OE.20.027003",

language = "English",

volume = "20",

pages = "27003--27017",

journal = "Optics Express",

issn = "1094-4087",

publisher = "The Optical Society",

number = "24",

}

TY - JOUR

T1 - A novel two-axis MEMS scanning mirror with a PZT actuator for laser scanning projection

AU - Chen, Chung De

AU - Wang, Yu Jen

AU - Chang, Pin

PY - 2012/11/19

Y1 - 2012/11/19

N2 - This study presents a novel design for a two-axis scanning device driven by lead-zirconate-titanate (PZT) ceramic. The proposed device consists of a scanning mirror and a Y-shaped piezoelectric actuator. The scanning mirror was fabricated using an MEMS process involving three masks. Experimental results show that the fast and slow frequencies at resonance are 25.0 kHz and 0.56 kHz, respectively. The optical scanning angles are 27.6° and 39.9°. The power consumption of the device is 13.4 mW at a driving voltage of 10 V. This study also develops a laser projection module integrated with the scanning device. The module can project a 2-D image at a resolution of 640 x 480.

AB - This study presents a novel design for a two-axis scanning device driven by lead-zirconate-titanate (PZT) ceramic. The proposed device consists of a scanning mirror and a Y-shaped piezoelectric actuator. The scanning mirror was fabricated using an MEMS process involving three masks. Experimental results show that the fast and slow frequencies at resonance are 25.0 kHz and 0.56 kHz, respectively. The optical scanning angles are 27.6° and 39.9°. The power consumption of the device is 13.4 mW at a driving voltage of 10 V. This study also develops a laser projection module integrated with the scanning device. The module can project a 2-D image at a resolution of 640 x 480.

UR - http://www.scopus.com/inward/record.url?scp=84870624133&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84870624133&partnerID=8YFLogxK

U2 - 10.1364/OE.20.027003

DO - 10.1364/OE.20.027003

M3 - Article

C2 - 23187556

AN - SCOPUS:84870624133

SN - 1094-4087

VL - 20

SP - 27003

EP - 27017

JO - Optics Express

JF - Optics Express

IS - 24

ER -

A novel two-axis MEMS scanning mirror with a PZT actuator for laser scanning projection

Abstract

All Science Journal Classification (ASJC) codes

Access to Document

Other files and links

Fingerprint

Cite this