TY - JOUR
T1 - A numerical study of factors affecting the characterization of nanoindentation on silicon
AU - Wang, Tong Hong
AU - Fang, Te Hua
AU - Lin, Yu Cheng
N1 - Funding Information:
This work was supported in part by the National Science Council of Taiwan under Grant number NSC94-2218-E150-045.
PY - 2007/2/25
Y1 - 2007/2/25
N2 - In this paper, the responses of nanoindentation on bulk silicon were investigated using finite element analysis. A two-dimensional finite element model under the assumption of axisymmetry was successfully validated by the experimental load-displacement curve. Four factors: coefficient of friction, indentation depth, tip rounding and indenter geometry were investigated to characterize the induced responses of bulk silicon via load-displacement curve, indentation surface profile at the maximum loading depth, residual surface profile after unloading, plastic energy, elastic energy, Young's modulus, hardness, and elastic recovery. Coefficients of friction were found to be insignificant, but the von Mises stress distributions after unloading between frictionless and frictional surfaces, indentation depth, tip rounding, and indenter geometry all showed having a distinct effect on stress, plastic energy, elastic energy, Young's modulus, hardness, elastic recovery and surface profile. The degree of pile-up affecting the investigated factors is discussed as well.
AB - In this paper, the responses of nanoindentation on bulk silicon were investigated using finite element analysis. A two-dimensional finite element model under the assumption of axisymmetry was successfully validated by the experimental load-displacement curve. Four factors: coefficient of friction, indentation depth, tip rounding and indenter geometry were investigated to characterize the induced responses of bulk silicon via load-displacement curve, indentation surface profile at the maximum loading depth, residual surface profile after unloading, plastic energy, elastic energy, Young's modulus, hardness, and elastic recovery. Coefficients of friction were found to be insignificant, but the von Mises stress distributions after unloading between frictionless and frictional surfaces, indentation depth, tip rounding, and indenter geometry all showed having a distinct effect on stress, plastic energy, elastic energy, Young's modulus, hardness, elastic recovery and surface profile. The degree of pile-up affecting the investigated factors is discussed as well.
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U2 - 10.1016/j.msea.2006.10.077
DO - 10.1016/j.msea.2006.10.077
M3 - Article
AN - SCOPUS:33846123305
SN - 0921-5093
VL - 447
SP - 244
EP - 253
JO - Materials Science and Engineering A
JF - Materials Science and Engineering A
IS - 1-2
ER -