A phase-shift resonant power system with novel plasma impedance measurement methodology for plasma cleaning applications

Ming Hsien Cheng, Tsorng-Juu Liang, Shih Ming Chen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Plasma cleaning has been broadly applied to remove impurities and contaminants from flexible substrates. The equivalent resistance of a plasma load is a very important factor for power measurement. However, the conventional Lissajous figure method requires an external capacitor serially connected to the plasma load, which conducts the DC bias and leads to large measurement deviation. Moreover, conventional plasma cleaning power supplies adopt a high turns ratio but a low-efficiency transformer to drive the plasma load. This study proposes an accurate plasma impedance measurement methodology that does not require an external capacitor and applies it to a parallel resonant full-bridge inverter. A digital signal processor is used to derive the equivalent impedances and estimate the output power and efficiency of the plasma load to achieve constant power control for a plasma power supply system. Based on experimental results, the calculated efficiency is very close to measured efficiency. A prototype inverter under phase-shift control is found presenting efficiency of 88.1% at a full load of 3 kW and 81.5% at a light load of 1 kW respectively.

Original languageEnglish
Title of host publication2017 IEEE 3rd International Future Energy Electronics Conference and ECCE Asia, IFEEC - ECCE Asia 2017
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages698-703
Number of pages6
ISBN (Electronic)9781509051571
DOIs
Publication statusPublished - 2017 Jul 25
Event3rd IEEE International Future Energy Electronics Conference and ECCE Asia, IFEEC - ECCE Asia 2017 - Kaohsiung, Taiwan
Duration: 2017 Jun 32017 Jun 7

Publication series

Name2017 IEEE 3rd International Future Energy Electronics Conference and ECCE Asia, IFEEC - ECCE Asia 2017

Other

Other3rd IEEE International Future Energy Electronics Conference and ECCE Asia, IFEEC - ECCE Asia 2017
CountryTaiwan
CityKaohsiung
Period17-06-0317-06-07

All Science Journal Classification (ASJC) codes

  • Energy Engineering and Power Technology
  • Electrical and Electronic Engineering
  • Control and Optimization

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    Cheng, M. H., Liang, T-J., & Chen, S. M. (2017). A phase-shift resonant power system with novel plasma impedance measurement methodology for plasma cleaning applications. In 2017 IEEE 3rd International Future Energy Electronics Conference and ECCE Asia, IFEEC - ECCE Asia 2017 (pp. 698-703). [7992124] (2017 IEEE 3rd International Future Energy Electronics Conference and ECCE Asia, IFEEC - ECCE Asia 2017). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/IFEEC.2017.7992124