Abstract
Miniature fluid pumps, measuring 15 × 4 × 1 mm, have been microfabricated with silicon, glass, and polyimide. Pumps have been tested with deionized water and 10% glycerol solutions as the working solutions. The pumps have been operated with a pneumatic drive or a pie-zoelectric drive. Flow rates from 0.1 to 110 μl min-1 have been achieved. The maximum pressure generated by the pumps was 56 cm of water. Pumps have been operated with a dialysis probe and with a microchannel load. The pump lifetime is limited by the degradation in the performance of the polyimide components in the pump. The power consumption was less than 1 mW at a drive frequency of 10 Hz.
Original language | English |
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Pages (from-to) | 561-583 |
Number of pages | 23 |
Journal | Mechatronics |
Volume | 8 |
Issue number | 5 |
DOIs | |
Publication status | Published - 1998 Aug 1 |
All Science Journal Classification (ASJC) codes
- Mechanical Engineering
- Electrical and Electronic Engineering
- Control and Systems Engineering
- Computer Science Applications