A positive displacement micropump for microdialysis

James Cunneen, Yu Cheng Lin, Simone Caraffini, James G. Boyd, Peter J. Hesketh, Susan M. Lunte, George S. Wilson

Research output: Contribution to journalArticlepeer-review

20 Citations (Scopus)

Abstract

Miniature fluid pumps, measuring 15 × 4 × 1 mm, have been microfabricated with silicon, glass, and polyimide. Pumps have been tested with deionized water and 10% glycerol solutions as the working solutions. The pumps have been operated with a pneumatic drive or a pie-zoelectric drive. Flow rates from 0.1 to 110 μl min-1 have been achieved. The maximum pressure generated by the pumps was 56 cm of water. Pumps have been operated with a dialysis probe and with a microchannel load. The pump lifetime is limited by the degradation in the performance of the polyimide components in the pump. The power consumption was less than 1 mW at a drive frequency of 10 Hz.

Original languageEnglish
Pages (from-to)561-583
Number of pages23
JournalMechatronics
Volume8
Issue number5
DOIs
Publication statusPublished - 1998 Aug 1

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering
  • Electrical and Electronic Engineering
  • Control and Systems Engineering
  • Computer Science Applications

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