A preliminary study of automated inspection of VLSI resist patterns

C. C. Li, J. F. Mancuso, D. B. Shu, Y. N. Sun, L. D. Roth

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

5 Citations (Scopus)

Fingerprint

Dive into the research topics of 'A preliminary study of automated inspection of VLSI resist patterns'. Together they form a unique fingerprint.

Engineering & Materials Science