A scanning micromirror with angular comb drive actuation

Pamela R. Patterson, Dooyoung Hah, Hung Nguyen, Hiroshi Toshiyoshi, Ru-Min Chao, Ming C. Wu

Research output: Contribution to journalArticle

94 Citations (Scopus)

Abstract

We describe a single crystal silicon, 1×1 mm2, scanning micromirror, which incorporates a novel angular vertical comb drive actuator. Results from our model for the angular vertical show that a 50% higher scan angle can be achieved when compared to a staggered vertical comb of equivalent dimensions. The simplified, cost effective, silicon on insulator micro-electro-mechanical systems, (SOI MEMS), process features self-alignment of the fixed and moving teeth and is fabricated on a single SOI wafer. Static deflection for our fabricated device fits well with the model and a resonant mode optical scan angle of ± 18° at 1.4 kHz has been measured.

Original languageEnglish
Pages (from-to)544-547
Number of pages4
JournalProceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
DOIs
Publication statusPublished - 2002 Jan 1

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Scanning
Silicon
Gear teeth
Actuators
Single crystals
Costs

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering
  • Electrical and Electronic Engineering
  • Control and Systems Engineering

Cite this

Patterson, Pamela R. ; Hah, Dooyoung ; Nguyen, Hung ; Toshiyoshi, Hiroshi ; Chao, Ru-Min ; Wu, Ming C. / A scanning micromirror with angular comb drive actuation. In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). 2002 ; pp. 544-547.
@article{0de437d420694d5fad917ca66774bdf3,
title = "A scanning micromirror with angular comb drive actuation",
abstract = "We describe a single crystal silicon, 1×1 mm2, scanning micromirror, which incorporates a novel angular vertical comb drive actuator. Results from our model for the angular vertical show that a 50{\%} higher scan angle can be achieved when compared to a staggered vertical comb of equivalent dimensions. The simplified, cost effective, silicon on insulator micro-electro-mechanical systems, (SOI MEMS), process features self-alignment of the fixed and moving teeth and is fabricated on a single SOI wafer. Static deflection for our fabricated device fits well with the model and a resonant mode optical scan angle of ± 18° at 1.4 kHz has been measured.",
author = "Patterson, {Pamela R.} and Dooyoung Hah and Hung Nguyen and Hiroshi Toshiyoshi and Ru-Min Chao and Wu, {Ming C.}",
year = "2002",
month = "1",
day = "1",
doi = "10.1109/MEMSYS.2002.984329",
language = "English",
pages = "544--547",
journal = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
issn = "1084-6999",
publisher = "Institute of Electrical and Electronics Engineers Inc.",

}

A scanning micromirror with angular comb drive actuation. / Patterson, Pamela R.; Hah, Dooyoung; Nguyen, Hung; Toshiyoshi, Hiroshi; Chao, Ru-Min; Wu, Ming C.

In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 01.01.2002, p. 544-547.

Research output: Contribution to journalArticle

TY - JOUR

T1 - A scanning micromirror with angular comb drive actuation

AU - Patterson, Pamela R.

AU - Hah, Dooyoung

AU - Nguyen, Hung

AU - Toshiyoshi, Hiroshi

AU - Chao, Ru-Min

AU - Wu, Ming C.

PY - 2002/1/1

Y1 - 2002/1/1

N2 - We describe a single crystal silicon, 1×1 mm2, scanning micromirror, which incorporates a novel angular vertical comb drive actuator. Results from our model for the angular vertical show that a 50% higher scan angle can be achieved when compared to a staggered vertical comb of equivalent dimensions. The simplified, cost effective, silicon on insulator micro-electro-mechanical systems, (SOI MEMS), process features self-alignment of the fixed and moving teeth and is fabricated on a single SOI wafer. Static deflection for our fabricated device fits well with the model and a resonant mode optical scan angle of ± 18° at 1.4 kHz has been measured.

AB - We describe a single crystal silicon, 1×1 mm2, scanning micromirror, which incorporates a novel angular vertical comb drive actuator. Results from our model for the angular vertical show that a 50% higher scan angle can be achieved when compared to a staggered vertical comb of equivalent dimensions. The simplified, cost effective, silicon on insulator micro-electro-mechanical systems, (SOI MEMS), process features self-alignment of the fixed and moving teeth and is fabricated on a single SOI wafer. Static deflection for our fabricated device fits well with the model and a resonant mode optical scan angle of ± 18° at 1.4 kHz has been measured.

UR - http://www.scopus.com/inward/record.url?scp=0036118040&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0036118040&partnerID=8YFLogxK

U2 - 10.1109/MEMSYS.2002.984329

DO - 10.1109/MEMSYS.2002.984329

M3 - Article

AN - SCOPUS:0036118040

SP - 544

EP - 547

JO - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

JF - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SN - 1084-6999

ER -