Abstract
We describe a single crystal silicon, 1×1 mm2, scanning micromirror, which incorporates a novel angular vertical comb drive actuator. Results from our model for the angular vertical show that a 50% higher scan angle can be achieved when compared to a staggered vertical comb of equivalent dimensions. The simplified, cost effective, silicon on insulator micro-electro-mechanical systems, (SOI MEMS), process features self-alignment of the fixed and moving teeth and is fabricated on a single SOI wafer. Static deflection for our fabricated device fits well with the model and a resonant mode optical scan angle of ± 18° at 1.4 kHz has been measured.
| Original language | English |
|---|---|
| Pages (from-to) | 544-547 |
| Number of pages | 4 |
| Journal | Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS) |
| DOIs | |
| Publication status | Published - 2002 Jan 1 |
Fingerprint
All Science Journal Classification (ASJC) codes
- Mechanical Engineering
- Electrical and Electronic Engineering
- Control and Systems Engineering
Cite this
}
A scanning micromirror with angular comb drive actuation. / Patterson, Pamela R.; Hah, Dooyoung; Nguyen, Hung; Toshiyoshi, Hiroshi; Chao, Ru-Min; Wu, Ming C.
In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 01.01.2002, p. 544-547.Research output: Contribution to journal › Article
TY - JOUR
T1 - A scanning micromirror with angular comb drive actuation
AU - Patterson, Pamela R.
AU - Hah, Dooyoung
AU - Nguyen, Hung
AU - Toshiyoshi, Hiroshi
AU - Chao, Ru-Min
AU - Wu, Ming C.
PY - 2002/1/1
Y1 - 2002/1/1
N2 - We describe a single crystal silicon, 1×1 mm2, scanning micromirror, which incorporates a novel angular vertical comb drive actuator. Results from our model for the angular vertical show that a 50% higher scan angle can be achieved when compared to a staggered vertical comb of equivalent dimensions. The simplified, cost effective, silicon on insulator micro-electro-mechanical systems, (SOI MEMS), process features self-alignment of the fixed and moving teeth and is fabricated on a single SOI wafer. Static deflection for our fabricated device fits well with the model and a resonant mode optical scan angle of ± 18° at 1.4 kHz has been measured.
AB - We describe a single crystal silicon, 1×1 mm2, scanning micromirror, which incorporates a novel angular vertical comb drive actuator. Results from our model for the angular vertical show that a 50% higher scan angle can be achieved when compared to a staggered vertical comb of equivalent dimensions. The simplified, cost effective, silicon on insulator micro-electro-mechanical systems, (SOI MEMS), process features self-alignment of the fixed and moving teeth and is fabricated on a single SOI wafer. Static deflection for our fabricated device fits well with the model and a resonant mode optical scan angle of ± 18° at 1.4 kHz has been measured.
UR - http://www.scopus.com/inward/record.url?scp=0036118040&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0036118040&partnerID=8YFLogxK
U2 - 10.1109/MEMSYS.2002.984329
DO - 10.1109/MEMSYS.2002.984329
M3 - Article
AN - SCOPUS:0036118040
SP - 544
EP - 547
JO - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
JF - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SN - 1084-6999
ER -