A scanning micromirror with angular comb drive actuation

Pamela R. Patterson; Dooyoung Hah; Hung Nguyen; Hiroshi Toshiyoshi; Ru min Chao; Ming C. Wu

doi:10.1109/MEMSYS.2002.984329

A scanning micromirror with angular comb drive actuation

Pamela R. Patterson, Dooyoung Hah, Hung Nguyen, Hiroshi Toshiyoshi, Ru min Chao, Ming C. Wu

Department of Systems and Naval Mechatronic Engineering

Research output: Contribution to journal › Article › peer-review

103 Citations (Scopus)

Abstract

We describe a single crystal silicon, 1×1 mm², scanning micromirror, which incorporates a novel angular vertical comb drive actuator. Results from our model for the angular vertical show that a 50% higher scan angle can be achieved when compared to a staggered vertical comb of equivalent dimensions. The simplified, cost effective, silicon on insulator micro-electro-mechanical systems, (SOI MEMS), process features self-alignment of the fixed and moving teeth and is fabricated on a single SOI wafer. Static deflection for our fabricated device fits well with the model and a resonant mode optical scan angle of ± 18° at 1.4 kHz has been measured.

Original language	English
Pages (from-to)	544-547
Number of pages	4
Journal	Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
DOIs	https://doi.org/10.1109/MEMSYS.2002.984329
Publication status	Published - 2002

All Science Journal Classification (ASJC) codes

Mechanical Engineering
Electrical and Electronic Engineering
Control and Systems Engineering

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10.1109/MEMSYS.2002.984329

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abstract = "We describe a single crystal silicon, 1×1 mm2, scanning micromirror, which incorporates a novel angular vertical comb drive actuator. Results from our model for the angular vertical show that a 50% higher scan angle can be achieved when compared to a staggered vertical comb of equivalent dimensions. The simplified, cost effective, silicon on insulator micro-electro-mechanical systems, (SOI MEMS), process features self-alignment of the fixed and moving teeth and is fabricated on a single SOI wafer. Static deflection for our fabricated device fits well with the model and a resonant mode optical scan angle of ± 18° at 1.4 kHz has been measured.",

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AU - Hah, Dooyoung

AU - Nguyen, Hung

AU - Toshiyoshi, Hiroshi

AU - Chao, Ru min

AU - Wu, Ming C.

PY - 2002

Y1 - 2002

N2 - We describe a single crystal silicon, 1×1 mm2, scanning micromirror, which incorporates a novel angular vertical comb drive actuator. Results from our model for the angular vertical show that a 50% higher scan angle can be achieved when compared to a staggered vertical comb of equivalent dimensions. The simplified, cost effective, silicon on insulator micro-electro-mechanical systems, (SOI MEMS), process features self-alignment of the fixed and moving teeth and is fabricated on a single SOI wafer. Static deflection for our fabricated device fits well with the model and a resonant mode optical scan angle of ± 18° at 1.4 kHz has been measured.

AB - We describe a single crystal silicon, 1×1 mm2, scanning micromirror, which incorporates a novel angular vertical comb drive actuator. Results from our model for the angular vertical show that a 50% higher scan angle can be achieved when compared to a staggered vertical comb of equivalent dimensions. The simplified, cost effective, silicon on insulator micro-electro-mechanical systems, (SOI MEMS), process features self-alignment of the fixed and moving teeth and is fabricated on a single SOI wafer. Static deflection for our fabricated device fits well with the model and a resonant mode optical scan angle of ± 18° at 1.4 kHz has been measured.

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A scanning micromirror with angular comb drive actuation

Abstract

All Science Journal Classification (ASJC) codes

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