A scanning micromirror with angular comb drive actuation

Pamela R. Patterson; Dooyoung Hah; Hung Nguyen; Hiroshi Toshiyoshi; Ru min Chao; Ming C. Wu

doi:10.1109/MEMSYS.2002.984329

A scanning micromirror with angular comb drive actuation

Pamela R. Patterson, Dooyoung Hah, Hung Nguyen, Hiroshi Toshiyoshi, Ru min Chao, Ming C. Wu

Department of Systems and Naval Mechatronic Engineering

Research output: Contribution to journal › Article › peer-review

101 Citations (Scopus)

Abstract

We describe a single crystal silicon, 1×1 mm², scanning micromirror, which incorporates a novel angular vertical comb drive actuator. Results from our model for the angular vertical show that a 50% higher scan angle can be achieved when compared to a staggered vertical comb of equivalent dimensions. The simplified, cost effective, silicon on insulator micro-electro-mechanical systems, (SOI MEMS), process features self-alignment of the fixed and moving teeth and is fabricated on a single SOI wafer. Static deflection for our fabricated device fits well with the model and a resonant mode optical scan angle of ± 18° at 1.4 kHz has been measured.

Original language	English
Pages (from-to)	544-547
Number of pages	4
Journal	Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
DOIs	https://doi.org/10.1109/MEMSYS.2002.984329
Publication status	Published - 2002 Jan 1

All Science Journal Classification (ASJC) codes

Mechanical Engineering
Electrical and Electronic Engineering
Control and Systems Engineering

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10.1109/MEMSYS.2002.984329

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@article{0de437d420694d5fad917ca66774bdf3,

title = "A scanning micromirror with angular comb drive actuation",

abstract = "We describe a single crystal silicon, 1×1 mm2, scanning micromirror, which incorporates a novel angular vertical comb drive actuator. Results from our model for the angular vertical show that a 50% higher scan angle can be achieved when compared to a staggered vertical comb of equivalent dimensions. The simplified, cost effective, silicon on insulator micro-electro-mechanical systems, (SOI MEMS), process features self-alignment of the fixed and moving teeth and is fabricated on a single SOI wafer. Static deflection for our fabricated device fits well with the model and a resonant mode optical scan angle of ± 18° at 1.4 kHz has been measured.",

author = "Patterson, {Pamela R.} and Dooyoung Hah and Hung Nguyen and Hiroshi Toshiyoshi and Chao, {Ru min} and Wu, {Ming C.}",

year = "2002",

month = jan,

day = "1",

doi = "10.1109/MEMSYS.2002.984329",

language = "English",

pages = "544--547",

journal = "Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)",

issn = "1084-6999",

}

TY - JOUR

T1 - A scanning micromirror with angular comb drive actuation

AU - Patterson, Pamela R.

AU - Hah, Dooyoung

AU - Nguyen, Hung

AU - Toshiyoshi, Hiroshi

AU - Chao, Ru min

AU - Wu, Ming C.

PY - 2002/1/1

Y1 - 2002/1/1

N2 - We describe a single crystal silicon, 1×1 mm2, scanning micromirror, which incorporates a novel angular vertical comb drive actuator. Results from our model for the angular vertical show that a 50% higher scan angle can be achieved when compared to a staggered vertical comb of equivalent dimensions. The simplified, cost effective, silicon on insulator micro-electro-mechanical systems, (SOI MEMS), process features self-alignment of the fixed and moving teeth and is fabricated on a single SOI wafer. Static deflection for our fabricated device fits well with the model and a resonant mode optical scan angle of ± 18° at 1.4 kHz has been measured.

AB - We describe a single crystal silicon, 1×1 mm2, scanning micromirror, which incorporates a novel angular vertical comb drive actuator. Results from our model for the angular vertical show that a 50% higher scan angle can be achieved when compared to a staggered vertical comb of equivalent dimensions. The simplified, cost effective, silicon on insulator micro-electro-mechanical systems, (SOI MEMS), process features self-alignment of the fixed and moving teeth and is fabricated on a single SOI wafer. Static deflection for our fabricated device fits well with the model and a resonant mode optical scan angle of ± 18° at 1.4 kHz has been measured.

UR - http://www.scopus.com/inward/record.url?scp=0036118040&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0036118040&partnerID=8YFLogxK

U2 - 10.1109/MEMSYS.2002.984329

DO - 10.1109/MEMSYS.2002.984329

M3 - Article

AN - SCOPUS:0036118040

SP - 544

EP - 547

JO - Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

JF - Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

SN - 1084-6999

ER -

A scanning micromirror with angular comb drive actuation

Abstract

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