A scanning micromirror with angular comb drive actuation

Pamela R. Patterson, Dooyoung Hah, Hung Nguyen, Hiroshi Toshiyoshi, Ru min Chao, Ming C. Wu

Research output: Contribution to journalArticlepeer-review

96 Citations (Scopus)

Abstract

We describe a single crystal silicon, 1×1 mm2, scanning micromirror, which incorporates a novel angular vertical comb drive actuator. Results from our model for the angular vertical show that a 50% higher scan angle can be achieved when compared to a staggered vertical comb of equivalent dimensions. The simplified, cost effective, silicon on insulator micro-electro-mechanical systems, (SOI MEMS), process features self-alignment of the fixed and moving teeth and is fabricated on a single SOI wafer. Static deflection for our fabricated device fits well with the model and a resonant mode optical scan angle of ± 18° at 1.4 kHz has been measured.

Original languageEnglish
Pages (from-to)544-547
Number of pages4
JournalProceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
DOIs
Publication statusPublished - 2002 Jan 1

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering
  • Electrical and Electronic Engineering
  • Control and Systems Engineering

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