A scanning micromirror with angular comb drive actuation

We describe a single crystal silicon, 1×1 mm², scanning micromirror, which incorporates a novel angular vertical comb drive actuator. Results from our model for the angular vertical show that a 50% higher scan angle can be achieved when compared to a staggered vertical comb of equivalent dimensions. The simplified, cost effective, silicon on insulator micro-electro-mechanical systems, (SOI MEMS), process features self-alignment of the fixed and moving teeth and is fabricated on a single SOI wafer. Static deflection for our fabricated device fits well with the model and a resonant mode optical scan angle of ± 18° at 1.4 kHz has been measured.