A secure collaborative e-Diagnostics framework for semiconductor factories

Min Hsiung Hung, Feng Yi Hsu, Tsung Li Wang, Fan Tien Cheng, Robin Lai, Tina Huang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

According to the collaborative Diagnostics functions and the interface C requirements suggested in the recent e-Diagnostics guidebook of International SEMATECH, this paper proposes a novel e-Diagnostics framework, called Secure Collaborative e-Diagnostics Framework (SCDF). SCDF is developed based on the technologies of Web Services, clustering, and new-generation information security. In addition to providing a variety of e-diagnostics functions, SCDF possesses mechanisms to solve several important issues, such as data isolation for different suppliers, supporting remote diagnoses through multi-party collaboration, diagnostics service and storage failover for assuring system availability and the security measures related to above issues. SCDF provides a possible solution to part of the e-Diagnostics interface C and can be applied in semiconductor industry to increase the equipment effectiveness and availability.

Original languageEnglish
Title of host publicationProceedings of the 2005 IEEE Conference on Automation Science and Engineering, IEEE-CASE 2005
Pages185-190
Number of pages6
DOIs
Publication statusPublished - 2005 Dec 1
Event2005 IEEE Conference on Automation Science and Engineering, IEEE-CASE 2005 - Edmonton, Canada
Duration: 2005 Aug 12005 Aug 2

Publication series

NameProceedings of the 2005 IEEE Conference on Automation Science and Engineering, IEEE-CASE 2005
Volume2005

Other

Other2005 IEEE Conference on Automation Science and Engineering, IEEE-CASE 2005
CountryCanada
CityEdmonton
Period05-08-0105-08-02

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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