A simple method for fabrication of high speed vertical cavity surface emitting lasers

Hsin Chieh Yu; Shoou Jinn Chang; Yan Kuin Su; Chia Pin Sung; Yu Wei Lin; Hung Pin Yang; Chun Yuan Huang; Jin Mei Wang

doi:10.1016/j.mseb.2003.09.020

A simple method for fabrication of high speed vertical cavity surface emitting lasers

Hsin Chieh Yu
, Shoou Jinn Chang
, Yan Kuin Su
, Chia Pin Sung
, Yu Wei Lin
, Hung Pin Yang
, Chun Yuan Huang
, Jin Mei Wang

Institute of Microelectronics

Research output: Contribution to journal › Article › peer-review

21 Citations (Scopus)

Abstract

A simple processing technology for oxide confined vertical-cavity surface-emitting lasers (VCSELs) fabrication is reported in this article. Results of the burn-in test up to the present-day show that the high temperature lifetime of the fabricated devices exceeded 70:00h. The eye diagrams show that the devices can be modulated up to 10Gbps.

Original language	English
Pages (from-to)	101-104
Number of pages	4
Journal	Materials Science and Engineering B: Solid-State Materials for Advanced Technology
Volume	106
Issue number	1
DOIs	https://doi.org/10.1016/j.mseb.2003.09.020
Publication status	Published - 2004 Jan 15

All Science Journal Classification (ASJC) codes

General Materials Science
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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10.1016/j.mseb.2003.09.020

Cite this

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title = "A simple method for fabrication of high speed vertical cavity surface emitting lasers",

abstract = "A simple processing technology for oxide confined vertical-cavity surface-emitting lasers (VCSELs) fabrication is reported in this article. Results of the burn-in test up to the present-day show that the high temperature lifetime of the fabricated devices exceeded 70:00h. The eye diagrams show that the devices can be modulated up to 10Gbps.",

author = "Yu, \{Hsin Chieh\} and Chang, \{Shoou Jinn\} and Su, \{Yan Kuin\} and Sung, \{Chia Pin\} and Lin, \{Yu Wei\} and Yang, \{Hung Pin\} and Huang, \{Chun Yuan\} and Wang, \{Jin Mei\}",

note = "Funding Information: The authors would like to thank Dr. S. W. Chiou of United Epitaxy Company for his technical support in high-speed measurement. The useful advises and suggestions from Prof. Hao-Chung Kuo of National Chiao Tung University are also appreciated. This work was supported by National Science Council under contract number NSC-89-2215-E-006-095. ",

year = "2004",

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day = "15",

doi = "10.1016/j.mseb.2003.09.020",

language = "English",

volume = "106",

pages = "101--104",

journal = "Materials Science and Engineering B: Solid-State Materials for Advanced Technology",

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publisher = "Elsevier Limited",

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T1 - A simple method for fabrication of high speed vertical cavity surface emitting lasers

AU - Yu, Hsin Chieh

AU - Chang, Shoou Jinn

AU - Su, Yan Kuin

AU - Sung, Chia Pin

AU - Lin, Yu Wei

AU - Yang, Hung Pin

AU - Huang, Chun Yuan

AU - Wang, Jin Mei

N1 - Funding Information: The authors would like to thank Dr. S. W. Chiou of United Epitaxy Company for his technical support in high-speed measurement. The useful advises and suggestions from Prof. Hao-Chung Kuo of National Chiao Tung University are also appreciated. This work was supported by National Science Council under contract number NSC-89-2215-E-006-095.

PY - 2004/1/15

Y1 - 2004/1/15

N2 - A simple processing technology for oxide confined vertical-cavity surface-emitting lasers (VCSELs) fabrication is reported in this article. Results of the burn-in test up to the present-day show that the high temperature lifetime of the fabricated devices exceeded 70:00h. The eye diagrams show that the devices can be modulated up to 10Gbps.

AB - A simple processing technology for oxide confined vertical-cavity surface-emitting lasers (VCSELs) fabrication is reported in this article. Results of the burn-in test up to the present-day show that the high temperature lifetime of the fabricated devices exceeded 70:00h. The eye diagrams show that the devices can be modulated up to 10Gbps.

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UR - https://www.scopus.com/pages/publications/0344014307#tab=citedBy

U2 - 10.1016/j.mseb.2003.09.020

DO - 10.1016/j.mseb.2003.09.020

M3 - Article

AN - SCOPUS:0344014307

SN - 0921-5107

VL - 106

SP - 101

EP - 104

JO - Materials Science and Engineering B: Solid-State Materials for Advanced Technology

JF - Materials Science and Engineering B: Solid-State Materials for Advanced Technology

IS - 1

ER -

A simple method for fabrication of high speed vertical cavity surface emitting lasers

Abstract

All Science Journal Classification (ASJC) codes

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