A smart flow sensor for flow direction measurement

Chia Yen Lee, Yu Hsiang Wang, Tzu Han Hsueh, Rong Hua Ma, Lung-Ming Fu, Po Cheng Chou

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

The purpose of this paper is to apply MEMS techniques to manufacture a gas flow sensor that consists with an airflow rate and airflow direction sensing units for detection of airflow states. This study uses a silicon wafer as a substrate which is deposited silicon nitride layers. To form the airflow rate sensing unit, a micro heater and a sensing resistor are manufactured over a membrane that released by a back-etching process. The airflow direction sensing unit is made of four cantilever beams that perpendicular to each other and integrated with piezoresistive structure on each micro-cantilever, respectively. As the cantilever beams are formed after etching the silicon wafer, it bends up a little due to the released residual stress induced in the previous fabrication process. As air flows through the airflow rate sensor, the temperature of the sensing resistor decreases and the evaluation of the local temperature changes determines the airflow rate. On the proposed sensor, the airflow direction can be determined through comparing the resistance variation caused by different deformation of cantilever beams at different directions.

Original languageEnglish
Title of host publicationMulti-functional Materials and Structures - International Conference on Multifunctional Materials and Structures
PublisherTrans Tech Publications
Pages189-192
Number of pages4
ISBN (Print)0878493786, 9780878493784
Publication statusPublished - 2008 Jan 1
EventMulti-functional Materials and Structures - International Conference on Multifunctional Materials and Structures - Hong Kong, P.R., China
Duration: 2008 Jul 282008 Jul 31

Publication series

NameAdvanced Materials Research
Volume47-50 PART 1
ISSN (Print)1022-6680

Other

OtherMulti-functional Materials and Structures - International Conference on Multifunctional Materials and Structures
CountryChina
CityHong Kong, P.R.
Period08-07-2808-07-31

Fingerprint

Cantilever beams
Silicon wafers
Resistors
Etching
Sensors
Silicon nitride
MEMS
Flow of gases
Residual stresses
Membranes
Fabrication
Temperature
Substrates
Air

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

Lee, C. Y., Wang, Y. H., Hsueh, T. H., Ma, R. H., Fu, L-M., & Chou, P. C. (2008). A smart flow sensor for flow direction measurement. In Multi-functional Materials and Structures - International Conference on Multifunctional Materials and Structures (pp. 189-192). (Advanced Materials Research; Vol. 47-50 PART 1). Trans Tech Publications.
Lee, Chia Yen ; Wang, Yu Hsiang ; Hsueh, Tzu Han ; Ma, Rong Hua ; Fu, Lung-Ming ; Chou, Po Cheng. / A smart flow sensor for flow direction measurement. Multi-functional Materials and Structures - International Conference on Multifunctional Materials and Structures. Trans Tech Publications, 2008. pp. 189-192 (Advanced Materials Research).
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Lee, CY, Wang, YH, Hsueh, TH, Ma, RH, Fu, L-M & Chou, PC 2008, A smart flow sensor for flow direction measurement. in Multi-functional Materials and Structures - International Conference on Multifunctional Materials and Structures. Advanced Materials Research, vol. 47-50 PART 1, Trans Tech Publications, pp. 189-192, Multi-functional Materials and Structures - International Conference on Multifunctional Materials and Structures, Hong Kong, P.R., China, 08-07-28.

A smart flow sensor for flow direction measurement. / Lee, Chia Yen; Wang, Yu Hsiang; Hsueh, Tzu Han; Ma, Rong Hua; Fu, Lung-Ming; Chou, Po Cheng.

Multi-functional Materials and Structures - International Conference on Multifunctional Materials and Structures. Trans Tech Publications, 2008. p. 189-192 (Advanced Materials Research; Vol. 47-50 PART 1).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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M3 - Conference contribution

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Lee CY, Wang YH, Hsueh TH, Ma RH, Fu L-M, Chou PC. A smart flow sensor for flow direction measurement. In Multi-functional Materials and Structures - International Conference on Multifunctional Materials and Structures. Trans Tech Publications. 2008. p. 189-192. (Advanced Materials Research).