TY - GEN
T1 - A study of friction and adhesion properties of ODS film on MEMS device
AU - Horng, Jeng Haur
AU - Lin, Jen Fin
AU - Chern, Shin Yuh
AU - Wei, Chin Chung
AU - Chen, Chun Yueh
N1 - Copyright:
Copyright 2012 Elsevier B.V., All rights reserved.
PY - 2012
Y1 - 2012
N2 - With the rapid development of microelectromechanical systems (MEMS) technology, materials such as silicon, metal, and polymers are widely used in the MEMS field. One of the reliability concerns related to Si MEMS is unwanted wear and adhesion. Therefore, SiC film is a possible choice for surfaces because of its favorable friction and wear properties such as used in cutting tool and transmission system of wind turbine. In this study, biocompatible SAM film (ODS) was used to decrease the adhesion force and the friction coefficient of SiC surface. Experimental results show that ODS can increase the contact angle and decrease the surface roughness value of SiC surfaces for the different roughness values and roughness directions. For Si, SiC film and SAMs film on surfaces, larger normal forces lead to smaller friction coefficients and cross roughness pattern have a smaller friction coefficient than that of straight roughness pattern. In addition, ODS film can decrease the friction coefficient on cross topography with relative small roughness value more effectively than can straight topography of SiC surfaces.
AB - With the rapid development of microelectromechanical systems (MEMS) technology, materials such as silicon, metal, and polymers are widely used in the MEMS field. One of the reliability concerns related to Si MEMS is unwanted wear and adhesion. Therefore, SiC film is a possible choice for surfaces because of its favorable friction and wear properties such as used in cutting tool and transmission system of wind turbine. In this study, biocompatible SAM film (ODS) was used to decrease the adhesion force and the friction coefficient of SiC surface. Experimental results show that ODS can increase the contact angle and decrease the surface roughness value of SiC surfaces for the different roughness values and roughness directions. For Si, SiC film and SAMs film on surfaces, larger normal forces lead to smaller friction coefficients and cross roughness pattern have a smaller friction coefficient than that of straight roughness pattern. In addition, ODS film can decrease the friction coefficient on cross topography with relative small roughness value more effectively than can straight topography of SiC surfaces.
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U2 - 10.4028/www.scientific.net/AMM.220-223.915
DO - 10.4028/www.scientific.net/AMM.220-223.915
M3 - Conference contribution
AN - SCOPUS:84870601985
SN - 9783037855034
T3 - Applied Mechanics and Materials
SP - 915
EP - 920
BT - Advances in Manufacturing Technology
T2 - 2nd International Conference on Advanced Design and Manufacturing Engineering, ADME 2012
Y2 - 16 August 2012 through 18 August 2012
ER -