A study of Love wave devices in ZnO/Quartz and ZnO/LiTaO3 structures

Ren Chuan Chang; Sheng Yuan Chu; Cheng Shong Hong; Yu Ting Chuang

doi:10.1016/j.tsf.2005.07.065

A study of Love wave devices in ZnO/Quartz and ZnO/LiTaO₃ structures

Ren Chuan Chang, Sheng Yuan Chu, Cheng Shong Hong, Yu Ting Chuang

Research output: Contribution to journal › Conference article › peer-review

27 Citations (Scopus)

Abstract

Love wave devices are very promising for sensing applications because of high sensitivity. In this paper, ZnO thin films doped with lithium (Li) and magnesium (Mg) were deposited on the 42°45′ ST-cut quartz and 36° YX-LiTaO₃ substrates by RF magnetron sputtering technique. XRD, SEM, and AFM measurements investigated characteristics of the films. Under different conditions such as doping content, layer thickness, and substrate temperature, the phase velocity, temperature coefficient of frequency, electromechanical coupling coefficient and sensitivity of Love wave devices in ZnO/Quartz and ZnO/LiTaO₃ structures are presented. The maximum sensitivities of ZnO/Quartz and ZnO/LiTaO₃ are much higher than the SiO ₂/Quartz and SiO₂/LiTaO₃ structures reported.

Original language	English
Pages (from-to)	146-151
Number of pages	6
Journal	Thin Solid Films
Volume	498
Issue number	1-2
DOIs	https://doi.org/10.1016/j.tsf.2005.07.065
Publication status	Published - 2006 Mar 1
Event	Proceedings of the Third Asian Conference on Chemical Vapor Deposition (Third Asian-CVD), Third Asian CVD - Duration: 2004 Nov 12 → 2004 Nov 14

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

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10.1016/j.tsf.2005.07.065

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title = "A study of Love wave devices in ZnO/Quartz and ZnO/LiTaO3 structures",

abstract = "Love wave devices are very promising for sensing applications because of high sensitivity. In this paper, ZnO thin films doped with lithium (Li) and magnesium (Mg) were deposited on the 42°45′ ST-cut quartz and 36° YX-LiTaO3 substrates by RF magnetron sputtering technique. XRD, SEM, and AFM measurements investigated characteristics of the films. Under different conditions such as doping content, layer thickness, and substrate temperature, the phase velocity, temperature coefficient of frequency, electromechanical coupling coefficient and sensitivity of Love wave devices in ZnO/Quartz and ZnO/LiTaO3 structures are presented. The maximum sensitivities of ZnO/Quartz and ZnO/LiTaO3 are much higher than the SiO 2/Quartz and SiO2/LiTaO3 structures reported.",

author = "Chang, {Ren Chuan} and Chu, {Sheng Yuan} and Hong, {Cheng Shong} and Chuang, {Yu Ting}",

note = "Funding Information: This research was supported by the National Science Council of Republic of China, under Grant NSC-93-2216-E-006-033. And the authors also gratefully acknowledge the supports from Center for Micro-Nanotechnology, National Cheng Kung University.; Proceedings of the Third Asian Conference on Chemical Vapor Deposition (Third Asian-CVD), Third Asian CVD ; Conference date: 12-11-2004 Through 14-11-2004",

year = "2006",

month = mar,

day = "1",

doi = "10.1016/j.tsf.2005.07.065",

language = "English",

volume = "498",

pages = "146--151",

journal = "Thin Solid Films",

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number = "1-2",

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TY - JOUR

T1 - A study of Love wave devices in ZnO/Quartz and ZnO/LiTaO3 structures

AU - Chang, Ren Chuan

AU - Chu, Sheng Yuan

AU - Hong, Cheng Shong

AU - Chuang, Yu Ting

N1 - Funding Information: This research was supported by the National Science Council of Republic of China, under Grant NSC-93-2216-E-006-033. And the authors also gratefully acknowledge the supports from Center for Micro-Nanotechnology, National Cheng Kung University.

PY - 2006/3/1

Y1 - 2006/3/1

N2 - Love wave devices are very promising for sensing applications because of high sensitivity. In this paper, ZnO thin films doped with lithium (Li) and magnesium (Mg) were deposited on the 42°45′ ST-cut quartz and 36° YX-LiTaO3 substrates by RF magnetron sputtering technique. XRD, SEM, and AFM measurements investigated characteristics of the films. Under different conditions such as doping content, layer thickness, and substrate temperature, the phase velocity, temperature coefficient of frequency, electromechanical coupling coefficient and sensitivity of Love wave devices in ZnO/Quartz and ZnO/LiTaO3 structures are presented. The maximum sensitivities of ZnO/Quartz and ZnO/LiTaO3 are much higher than the SiO 2/Quartz and SiO2/LiTaO3 structures reported.

AB - Love wave devices are very promising for sensing applications because of high sensitivity. In this paper, ZnO thin films doped with lithium (Li) and magnesium (Mg) were deposited on the 42°45′ ST-cut quartz and 36° YX-LiTaO3 substrates by RF magnetron sputtering technique. XRD, SEM, and AFM measurements investigated characteristics of the films. Under different conditions such as doping content, layer thickness, and substrate temperature, the phase velocity, temperature coefficient of frequency, electromechanical coupling coefficient and sensitivity of Love wave devices in ZnO/Quartz and ZnO/LiTaO3 structures are presented. The maximum sensitivities of ZnO/Quartz and ZnO/LiTaO3 are much higher than the SiO 2/Quartz and SiO2/LiTaO3 structures reported.

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U2 - 10.1016/j.tsf.2005.07.065

DO - 10.1016/j.tsf.2005.07.065

M3 - Conference article

AN - SCOPUS:30944461193

SN - 0040-6090

VL - 498

SP - 146

EP - 151

JO - Thin Solid Films

JF - Thin Solid Films

IS - 1-2

T2 - Proceedings of the Third Asian Conference on Chemical Vapor Deposition (Third Asian-CVD), Third Asian CVD

Y2 - 12 November 2004 through 14 November 2004

ER -

A study of Love wave devices in ZnO/Quartz and ZnO/LiTaO₃ structures

Abstract

All Science Journal Classification (ASJC) codes

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