A study of Love wave devices in ZnO/Quartz and ZnO/LiTaO3 structures

Ren Chuan Chang, Sheng Yuan Chu, Cheng Shong Hong, Yu Ting Chuang

Research output: Contribution to journalConference article

24 Citations (Scopus)

Abstract

Love wave devices are very promising for sensing applications because of high sensitivity. In this paper, ZnO thin films doped with lithium (Li) and magnesium (Mg) were deposited on the 42°45′ ST-cut quartz and 36° YX-LiTaO3 substrates by RF magnetron sputtering technique. XRD, SEM, and AFM measurements investigated characteristics of the films. Under different conditions such as doping content, layer thickness, and substrate temperature, the phase velocity, temperature coefficient of frequency, electromechanical coupling coefficient and sensitivity of Love wave devices in ZnO/Quartz and ZnO/LiTaO3 structures are presented. The maximum sensitivities of ZnO/Quartz and ZnO/LiTaO3 are much higher than the SiO 2/Quartz and SiO2/LiTaO3 structures reported.

Original languageEnglish
Pages (from-to)146-151
Number of pages6
JournalThin Solid Films
Volume498
Issue number1-2
DOIs
Publication statusPublished - 2006 Mar 1
EventProceedings of the Third Asian Conference on Chemical Vapor Deposition (Third Asian-CVD), Third Asian CVD -
Duration: 2004 Nov 122004 Nov 14

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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