TY - JOUR
T1 - A study on the low-temperature wet synthesis of hydrofluoric acid from synthetic calcium fluoride and waste sulfuric acid
AU - Lin, Min Fa
AU - Chang, Chih Ping
AU - Chang, Ken Lin
AU - Lee, Wen Jhy
AU - Wu, Jhong Lin
AU - Chen, Po Han
N1 - Funding Information:
The study was sponsored by Southern Taiwan Science Park Bureau and the Ministry of Science and Technology of Taiwan (106–2218-E-110–009-MY2), the Ministry of Science and Technology of Taiwan (106-2218-E-110-009-MY2 and 108-2221-E-110-051), the National Natural Science Foundation of China (No. 51608129, 51978175) and TEEP@Asia Plus 2019-2010, Taiwan.
Publisher Copyright:
© 2020 Institute of Physics Publishing. All rights reserved.
PY - 2020/4/6
Y1 - 2020/4/6
N2 - An innovative method for utilizing synthetic calcium fluoride (CaF2), recovered from fluoride-containing semiconductor wastewater, and waste sulfuric acid (H2SO4) to produce hydrofluoric acid (HF) was investigated. The research was set to study the low-temperature production of HF via the reaction of synthetic CaF2 and waste H2SO4. The impact of H2SO4 concentration and total volume (H2SO4 + H2O)/CaF2 ratio, drying temperature of synthetic CaF2 on HF productivity were investigated in this study. HF yield increased with increasing H2SO4 concentration and total volume/CaF2 ratio under room temperature. In addition, the HF produced in the reactions involving the 105 oC-dried synthetic CaF2 were higher than the 600 oC-dried synthetic CaF2 ones. The study will not only find uses for this semiconductor wastes but also provide a greener alternative to the current commercial production of HF.
AB - An innovative method for utilizing synthetic calcium fluoride (CaF2), recovered from fluoride-containing semiconductor wastewater, and waste sulfuric acid (H2SO4) to produce hydrofluoric acid (HF) was investigated. The research was set to study the low-temperature production of HF via the reaction of synthetic CaF2 and waste H2SO4. The impact of H2SO4 concentration and total volume (H2SO4 + H2O)/CaF2 ratio, drying temperature of synthetic CaF2 on HF productivity were investigated in this study. HF yield increased with increasing H2SO4 concentration and total volume/CaF2 ratio under room temperature. In addition, the HF produced in the reactions involving the 105 oC-dried synthetic CaF2 were higher than the 600 oC-dried synthetic CaF2 ones. The study will not only find uses for this semiconductor wastes but also provide a greener alternative to the current commercial production of HF.
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U2 - 10.1088/1755-1315/463/1/012098
DO - 10.1088/1755-1315/463/1/012098
M3 - Conference article
AN - SCOPUS:85083452159
SN - 1755-1307
VL - 463
JO - IOP Conference Series: Earth and Environmental Science
JF - IOP Conference Series: Earth and Environmental Science
IS - 1
M1 - 12098
T2 - International Conference on Sustainable Energy and Green Technology 2019, SEGT 2019
Y2 - 11 December 2019 through 14 December 2019
ER -