A study on the low-temperature wet synthesis of hydrofluoric acid from synthetic calcium fluoride and waste sulfuric acid

Min Fa Lin, Chih Ping Chang, Ken Lin Chang, Wen Jhy Lee, Jhong Lin Wu, Po Han Chen

Research output: Contribution to journalConference articlepeer-review

1 Citation (Scopus)

Abstract

An innovative method for utilizing synthetic calcium fluoride (CaF2), recovered from fluoride-containing semiconductor wastewater, and waste sulfuric acid (H2SO4) to produce hydrofluoric acid (HF) was investigated. The research was set to study the low-temperature production of HF via the reaction of synthetic CaF2 and waste H2SO4. The impact of H2SO4 concentration and total volume (H2SO4 + H2O)/CaF2 ratio, drying temperature of synthetic CaF2 on HF productivity were investigated in this study. HF yield increased with increasing H2SO4 concentration and total volume/CaF2 ratio under room temperature. In addition, the HF produced in the reactions involving the 105 oC-dried synthetic CaF2 were higher than the 600 oC-dried synthetic CaF2 ones. The study will not only find uses for this semiconductor wastes but also provide a greener alternative to the current commercial production of HF.

Original languageEnglish
Article number12098
JournalIOP Conference Series: Earth and Environmental Science
Volume463
Issue number1
DOIs
Publication statusPublished - 2020 Apr 6
EventInternational Conference on Sustainable Energy and Green Technology 2019, SEGT 2019 - Bangkok, Thailand
Duration: 2019 Dec 112019 Dec 14

All Science Journal Classification (ASJC) codes

  • General Environmental Science
  • General Earth and Planetary Sciences

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