A Transparent Electrode Prepared by Co-sputtering System

Day Shan Liu; Chun Ching Wu; Ching Ting Lee

A Transparent Electrode Prepared by Co-sputtering System

Day Shan Liu, Chun Ching Wu, Ching Ting Lee

Department of Photonics

Research output: Contribution to journal › Article › peer-review

Abstract

The transparent electrode obtained from co-sputtering system with ITO and ZnO targets had been investigated. The resistivity was significant improved with an additional co-sputtered ZnO target compared to the individual ITO film. A lowest resistivity transparent film of 3.69 x 10^-4 Ω-cm was achieved at room temperature as the rf power of co-sputtering system for ITO and ZnO targets being 150W and 75W, respectively. The average transmittance in visible wavelength was over 80% obtained from these co-sputtering films. The surface roughness of these co-sputtered films was also superior to individual ITO films attributed to amorphous formation prepared by co-sputtered ITO and ZnO targets.

Original language	English
Pages (from-to)	502-505
Number of pages	4
Journal	International Journal of Microwave and Optical Technology
Volume	1
Issue number	2-I
Publication status	Published - 2006 Aug

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

Cite this

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title = "A Transparent Electrode Prepared by Co-sputtering System",

abstract = "The transparent electrode obtained from co-sputtering system with ITO and ZnO targets had been investigated. The resistivity was significant improved with an additional co-sputtered ZnO target compared to the individual ITO film. A lowest resistivity transparent film of 3.69 x 10-4 Ω-cm was achieved at room temperature as the rf power of co-sputtering system for ITO and ZnO targets being 150W and 75W, respectively. The average transmittance in visible wavelength was over 80% obtained from these co-sputtering films. The surface roughness of these co-sputtered films was also superior to individual ITO films attributed to amorphous formation prepared by co-sputtered ITO and ZnO targets.",

author = "Liu, {Day Shan} and Wu, {Chun Ching} and Lee, {Ching Ting}",

note = "Funding Information: This work was supported by the National Science Council of the Republic of China under NSC93-2215-E150-006. Publisher Copyright: {\textcopyright} 2006 ISRAMT. All Rights Reserved.",

year = "2006",

month = aug,

language = "English",

volume = "1",

pages = "502--505",

journal = "International Journal of Microwave and Optical Technology",

issn = "1553-0396",

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N2 - The transparent electrode obtained from co-sputtering system with ITO and ZnO targets had been investigated. The resistivity was significant improved with an additional co-sputtered ZnO target compared to the individual ITO film. A lowest resistivity transparent film of 3.69 x 10-4 Ω-cm was achieved at room temperature as the rf power of co-sputtering system for ITO and ZnO targets being 150W and 75W, respectively. The average transmittance in visible wavelength was over 80% obtained from these co-sputtering films. The surface roughness of these co-sputtered films was also superior to individual ITO films attributed to amorphous formation prepared by co-sputtered ITO and ZnO targets.

AB - The transparent electrode obtained from co-sputtering system with ITO and ZnO targets had been investigated. The resistivity was significant improved with an additional co-sputtered ZnO target compared to the individual ITO film. A lowest resistivity transparent film of 3.69 x 10-4 Ω-cm was achieved at room temperature as the rf power of co-sputtering system for ITO and ZnO targets being 150W and 75W, respectively. The average transmittance in visible wavelength was over 80% obtained from these co-sputtering films. The surface roughness of these co-sputtered films was also superior to individual ITO films attributed to amorphous formation prepared by co-sputtered ITO and ZnO targets.

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A Transparent Electrode Prepared by Co-sputtering System

Abstract

All Science Journal Classification (ASJC) codes

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