TY - GEN
T1 - A two-axis water-immersible MEMS scanning mirror for scanning optical and acoustic microscopy
AU - Xu, Song
AU - Huang, Chih Hsien
AU - Zou, Jun
N1 - Publisher Copyright:
© 2016 SPIE.
PY - 2016
Y1 - 2016
N2 - Fast scanning is highly desired for both ultrasound and photoacoustic microscopic imaging. Limited by water environment required for acoustic propagation, traditional mircoelectromechanical system (MEMS) scanning mirrors could not be widely used. In this paper, a new water-immersible scanning mirror microsystem has been designed, fabricated and tested. Polymer hinges were employed to achieve reliable under water performance. Two pairs of high strength neodymium magnet disc and three compact RF choke inductor were used to actuate mirror module. Experimental results show that the fast axis can reach a mechanical scanning angle of ±15° at the resonance frequency of 350 Hz in air, and ±12.5° at the resonance frequency of 240 Hz in water, respectively. The slow axis can reach a mechanical scanning angle of ±15° at the resonance frequency of 20 Hz in air, and ±12.5° at the resonance frequency of 13 Hz in water, respectively. The two scanning axes have very different resonance frequencies, which are suitable for raster scanning.
AB - Fast scanning is highly desired for both ultrasound and photoacoustic microscopic imaging. Limited by water environment required for acoustic propagation, traditional mircoelectromechanical system (MEMS) scanning mirrors could not be widely used. In this paper, a new water-immersible scanning mirror microsystem has been designed, fabricated and tested. Polymer hinges were employed to achieve reliable under water performance. Two pairs of high strength neodymium magnet disc and three compact RF choke inductor were used to actuate mirror module. Experimental results show that the fast axis can reach a mechanical scanning angle of ±15° at the resonance frequency of 350 Hz in air, and ±12.5° at the resonance frequency of 240 Hz in water, respectively. The slow axis can reach a mechanical scanning angle of ±15° at the resonance frequency of 20 Hz in air, and ±12.5° at the resonance frequency of 13 Hz in water, respectively. The two scanning axes have very different resonance frequencies, which are suitable for raster scanning.
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U2 - 10.1117/12.2211752
DO - 10.1117/12.2211752
M3 - Conference contribution
AN - SCOPUS:84987602350
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - MOEMS and Miniaturized Systems XV
A2 - Piyawattanametha, Wibool
A2 - Park, Yong-Hwa
PB - SPIE
T2 - MOEMS and Miniaturized Systems XV
Y2 - 15 February 2016 through 17 February 2016
ER -