A two-axis water-immersible MEMS scanning mirror for scanning optical and acoustic microscopy

Song Xu, Chih Hsien Huang, Jun Zou

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Fast scanning is highly desired for both ultrasound and photoacoustic microscopic imaging. Limited by water environment required for acoustic propagation, traditional mircoelectromechanical system (MEMS) scanning mirrors could not be widely used. In this paper, a new water-immersible scanning mirror microsystem has been designed, fabricated and tested. Polymer hinges were employed to achieve reliable under water performance. Two pairs of high strength neodymium magnet disc and three compact RF choke inductor were used to actuate mirror module. Experimental results show that the fast axis can reach a mechanical scanning angle of ±15° at the resonance frequency of 350 Hz in air, and ±12.5° at the resonance frequency of 240 Hz in water, respectively. The slow axis can reach a mechanical scanning angle of ±15° at the resonance frequency of 20 Hz in air, and ±12.5° at the resonance frequency of 13 Hz in water, respectively. The two scanning axes have very different resonance frequencies, which are suitable for raster scanning.

Original languageEnglish
Title of host publicationMOEMS and Miniaturized Systems XV
EditorsWibool Piyawattanametha, Yong-Hwa Park
PublisherSPIE
ISBN (Electronic)9781628419955
DOIs
Publication statusPublished - 2016 Jan 1
EventMOEMS and Miniaturized Systems XV - San Francisco, United States
Duration: 2016 Feb 152016 Feb 17

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume9760
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Other

OtherMOEMS and Miniaturized Systems XV
CountryUnited States
CitySan Francisco
Period16-02-1516-02-17

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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