A wear-resistant coating-Oxidized graded multilayer TiN/W coating

S. H. Yao, Y. L. Su, W. H. Kao, K. W. Cheng

Research output: Contribution to journalArticlepeer-review

12 Citations (Scopus)


Combining sputtering technology using an industrial-scale four-target DC closed-field unbalanced magnetron sputtering ion plating system (CFUBMSIPS™) with post heat treatment, a graded multilayer TiN/W coating, consisting of five layers, was synthesized and its outmost W layer was transformed to lubricious WO3 successfully. The coatings were characterized by using GDOES, GXRD, a Rockwell C indentation tester, a nanoindentation tester, and a scratching tester. Wear behavior of coatings was evaluated by using a pin-on-disc tribometer. Through proper post heat treatment, the multilayer TiN/W coating, in spite of having a lower nano-hardness, showed good adhesion, much better wear performance and lower friction coefficient compared with the reference monolayer TiN coating.

Original languageEnglish
Pages (from-to)99-101
Number of pages3
JournalMaterials Letters
Issue number1
Publication statusPublished - 2010 Jan 15

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering


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