A WO3 nanoparticles NO gas sensor prepared by hot-wire CVD

Chih Hung Lin; Shoou Jinn Chang; Ting Jen Hsueh

doi:10.1109/LED.2016.2647235

A WO₃ nanoparticles NO gas sensor prepared by hot-wire CVD

Chih Hung Lin, Shoou Jinn Chang, Ting Jen Hsueh

Research output: Contribution to journal › Review article › peer-review

40 Citations (Scopus)

Abstract

In this letter, a WO₃ nanoparticle gas sensor was fabricated using an ICP-assisted hot wire system. The results of experiments indicated that the sensitivity became smaller when the measured temperature increased. It was also found that the WO₃ nanoparticle gas sensor prepared at an annealing temperature of 400 °C had the greatest sensitivity. The measured sensitivity for a micro-electromechanical system type WO₃ nanoparticle gas sensor was found to be around 3.22, 3.91, 5.02, 7.52, 11.68, and 15.93 when the operating temperature of the micro-heater was 150 °C and the concentration of injected NO gas was 100, 150, 200, 250, 300, and 350 ppb, respectively.

Original language	English
Article number	7803548
Pages (from-to)	266-269
Number of pages	4
Journal	IEEE Electron Device Letters
Volume	38
Issue number	2
DOIs	https://doi.org/10.1109/LED.2016.2647235
Publication status	Published - 2017 Feb

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

Access to Document

10.1109/LED.2016.2647235

Cite this

@article{59ad86cbec6c48a2bb264423de697591,

title = "A WO3 nanoparticles NO gas sensor prepared by hot-wire CVD",

abstract = "In this letter, a WO3 nanoparticle gas sensor was fabricated using an ICP-assisted hot wire system. The results of experiments indicated that the sensitivity became smaller when the measured temperature increased. It was also found that the WO3 nanoparticle gas sensor prepared at an annealing temperature of 400 °C had the greatest sensitivity. The measured sensitivity for a micro-electromechanical system type WO3 nanoparticle gas sensor was found to be around 3.22, 3.91, 5.02, 7.52, 11.68, and 15.93 when the operating temperature of the micro-heater was 150 °C and the concentration of injected NO gas was 100, 150, 200, 250, 300, and 350 ppb, respectively.",

author = "Lin, {Chih Hung} and Chang, {Shoou Jinn} and Hsueh, {Ting Jen}",

note = "Funding Information: This work was supported in part by the National Science Council and in part by the National Nano Devices Laboratories, Tainan, Taiwan, under Contract 103-2221-E-492-047-MY3. Publisher Copyright: {\textcopyright} 1980-2012 IEEE.",

year = "2017",

month = feb,

doi = "10.1109/LED.2016.2647235",

language = "English",

volume = "38",

pages = "266--269",

journal = "IEEE Electron Device Letters",

issn = "0741-3106",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "2",

}

TY - JOUR

T1 - A WO3 nanoparticles NO gas sensor prepared by hot-wire CVD

AU - Lin, Chih Hung

AU - Chang, Shoou Jinn

AU - Hsueh, Ting Jen

N1 - Funding Information: This work was supported in part by the National Science Council and in part by the National Nano Devices Laboratories, Tainan, Taiwan, under Contract 103-2221-E-492-047-MY3. Publisher Copyright: © 1980-2012 IEEE.

PY - 2017/2

Y1 - 2017/2

N2 - In this letter, a WO3 nanoparticle gas sensor was fabricated using an ICP-assisted hot wire system. The results of experiments indicated that the sensitivity became smaller when the measured temperature increased. It was also found that the WO3 nanoparticle gas sensor prepared at an annealing temperature of 400 °C had the greatest sensitivity. The measured sensitivity for a micro-electromechanical system type WO3 nanoparticle gas sensor was found to be around 3.22, 3.91, 5.02, 7.52, 11.68, and 15.93 when the operating temperature of the micro-heater was 150 °C and the concentration of injected NO gas was 100, 150, 200, 250, 300, and 350 ppb, respectively.

AB - In this letter, a WO3 nanoparticle gas sensor was fabricated using an ICP-assisted hot wire system. The results of experiments indicated that the sensitivity became smaller when the measured temperature increased. It was also found that the WO3 nanoparticle gas sensor prepared at an annealing temperature of 400 °C had the greatest sensitivity. The measured sensitivity for a micro-electromechanical system type WO3 nanoparticle gas sensor was found to be around 3.22, 3.91, 5.02, 7.52, 11.68, and 15.93 when the operating temperature of the micro-heater was 150 °C and the concentration of injected NO gas was 100, 150, 200, 250, 300, and 350 ppb, respectively.

UR - http://www.scopus.com/inward/record.url?scp=85011263077&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85011263077&partnerID=8YFLogxK

U2 - 10.1109/LED.2016.2647235

DO - 10.1109/LED.2016.2647235

M3 - Review article

AN - SCOPUS:85011263077

SN - 0741-3106

VL - 38

SP - 266

EP - 269

JO - IEEE Electron Device Letters

JF - IEEE Electron Device Letters

IS - 2

M1 - 7803548

ER -

A WO₃ nanoparticles NO gas sensor prepared by hot-wire CVD

Abstract

All Science Journal Classification (ASJC) codes

Access to Document

Other files and links

Fingerprint

Cite this