A WO3 nanoparticles NO gas sensor prepared by hot-wire CVD

Chih Hung Lin, Shoou Jinn Chang, Ting Jen Hsueh

Research output: Contribution to journalReview article

16 Citations (Scopus)

Abstract

In this letter, a WO3 nanoparticle gas sensor was fabricated using an ICP-assisted hot wire system. The results of experiments indicated that the sensitivity became smaller when the measured temperature increased. It was also found that the WO3 nanoparticle gas sensor prepared at an annealing temperature of 400 °C had the greatest sensitivity. The measured sensitivity for a micro-electromechanical system type WO3 nanoparticle gas sensor was found to be around 3.22, 3.91, 5.02, 7.52, 11.68, and 15.93 when the operating temperature of the micro-heater was 150 °C and the concentration of injected NO gas was 100, 150, 200, 250, 300, and 350 ppb, respectively.

Original languageEnglish
Article number7803548
Pages (from-to)266-269
Number of pages4
JournalIEEE Electron Device Letters
Volume38
Issue number2
DOIs
Publication statusPublished - 2017 Feb

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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