A ZnO nanowire-based humidity sensor

Sheng Po Chang, Shoou Jinn Chang, Chien Yuan Lu, Meng Ju Li, Cheng Liang Hsu, Yu Zung Chiou, Ting Jen Hsueh, I. Cherng Chen

Research output: Contribution to journalArticle

88 Citations (Scopus)


In this paper, we report the growth of high-density single crystalline ZnO nanowires on patterned ZnO:Ga/SiO2/Si templates. A humidity sensor was then fabricated using the randomly oriented nanowires bridged across two electrodes. By measuring current-voltage characteristics of the fabricated device at 80°C, it was found that measured resistances were 5.9×105, 4.3×105, 3.7×105 and 3.2×105Ω when measured with 25%, 50%, 70% and 90% relative humidity, respectively.

Original languageEnglish
Pages (from-to)772-778
Number of pages7
JournalSuperlattices and Microstructures
Issue number6
Publication statusPublished - 2010 Jun 1

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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    Chang, S. P., Chang, S. J., Lu, C. Y., Li, M. J., Hsu, C. L., Chiou, Y. Z., Hsueh, T. J., & Chen, I. C. (2010). A ZnO nanowire-based humidity sensor. Superlattices and Microstructures, 47(6), 772-778. https://doi.org/10.1016/j.spmi.2010.03.006