A ZnO nanowire-based humidity sensor

Sheng Po Chang; Shoou Jinn Chang; Chien Yuan Lu; Meng Ju Li; Cheng Liang Hsu; Yu Zung Chiou; Ting Jen Hsueh; I. Cherng Chen

doi:10.1016/j.spmi.2010.03.006

A ZnO nanowire-based humidity sensor

Sheng Po Chang, Shoou Jinn Chang, Chien Yuan Lu, Meng Ju Li, Cheng Liang Hsu, Yu Zung Chiou, Ting Jen Hsueh, I. Cherng Chen

Research output: Contribution to journal › Article › peer-review

124 Citations (Scopus)

Abstract

In this paper, we report the growth of high-density single crystalline ZnO nanowires on patterned ZnO:Ga/SiO₂/Si templates. A humidity sensor was then fabricated using the randomly oriented nanowires bridged across two electrodes. By measuring current-voltage characteristics of the fabricated device at 80°C, it was found that measured resistances were 5.9×10⁵, 4.3×10⁵, 3.7×10⁵ and 3.2×10⁵Ω when measured with 25%, 50%, 70% and 90% relative humidity, respectively.

Original language	English
Pages (from-to)	772-778
Number of pages	7
Journal	Superlattices and Microstructures
Volume	47
Issue number	6
DOIs	https://doi.org/10.1016/j.spmi.2010.03.006
Publication status	Published - 2010 Jun

All Science Journal Classification (ASJC) codes

General Materials Science
Condensed Matter Physics
Electrical and Electronic Engineering

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10.1016/j.spmi.2010.03.006

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title = "A ZnO nanowire-based humidity sensor",

abstract = "In this paper, we report the growth of high-density single crystalline ZnO nanowires on patterned ZnO:Ga/SiO2/Si templates. A humidity sensor was then fabricated using the randomly oriented nanowires bridged across two electrodes. By measuring current-voltage characteristics of the fabricated device at 80°C, it was found that measured resistances were 5.9×105, 4.3×105, 3.7×105 and 3.2×105Ω when measured with 25%, 50%, 70% and 90% relative humidity, respectively.",

author = "Chang, {Sheng Po} and Chang, {Shoou Jinn} and Lu, {Chien Yuan} and Li, {Meng Ju} and Hsu, {Cheng Liang} and Chiou, {Yu Zung} and Hsueh, {Ting Jen} and Chen, {I. Cherng}",

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T1 - A ZnO nanowire-based humidity sensor

AU - Chang, Sheng Po

AU - Chang, Shoou Jinn

AU - Lu, Chien Yuan

AU - Li, Meng Ju

AU - Hsu, Cheng Liang

AU - Chiou, Yu Zung

AU - Hsueh, Ting Jen

AU - Chen, I. Cherng

PY - 2010/6

Y1 - 2010/6

N2 - In this paper, we report the growth of high-density single crystalline ZnO nanowires on patterned ZnO:Ga/SiO2/Si templates. A humidity sensor was then fabricated using the randomly oriented nanowires bridged across two electrodes. By measuring current-voltage characteristics of the fabricated device at 80°C, it was found that measured resistances were 5.9×105, 4.3×105, 3.7×105 and 3.2×105Ω when measured with 25%, 50%, 70% and 90% relative humidity, respectively.

AB - In this paper, we report the growth of high-density single crystalline ZnO nanowires on patterned ZnO:Ga/SiO2/Si templates. A humidity sensor was then fabricated using the randomly oriented nanowires bridged across two electrodes. By measuring current-voltage characteristics of the fabricated device at 80°C, it was found that measured resistances were 5.9×105, 4.3×105, 3.7×105 and 3.2×105Ω when measured with 25%, 50%, 70% and 90% relative humidity, respectively.

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SN - 0749-6036

VL - 47

SP - 772

EP - 778

JO - Superlattices and Microstructures

JF - Superlattices and Microstructures

IS - 6

ER -

A ZnO nanowire-based humidity sensor

Abstract

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