Adaptive Genetic Algorithm for Lithography Scheduling in Semiconductor DRAM Fab.

Chia-Yen Lee, C. M. Wu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publication2019 IEEE 15th International Conference on Automation Science and Engineering (CASE)
Place of PublicationVancouver, BC, Canada
Publication statusPublished - 2019

Cite this

Lee, C-Y., & Wu, C. M. (2019). Adaptive Genetic Algorithm for Lithography Scheduling in Semiconductor DRAM Fab. In 2019 IEEE 15th International Conference on Automation Science and Engineering (CASE) Vancouver, BC, Canada.
Lee, Chia-Yen ; Wu, C. M. / Adaptive Genetic Algorithm for Lithography Scheduling in Semiconductor DRAM Fab. 2019 IEEE 15th International Conference on Automation Science and Engineering (CASE). Vancouver, BC, Canada, 2019.
@inproceedings{5977b9f7552a4d528ca11175eb4946a4,
title = "Adaptive Genetic Algorithm for Lithography Scheduling in Semiconductor DRAM Fab.",
author = "Chia-Yen Lee and Wu, {C. M.}",
year = "2019",
language = "English",
booktitle = "2019 IEEE 15th International Conference on Automation Science and Engineering (CASE)",

}

Lee, C-Y & Wu, CM 2019, Adaptive Genetic Algorithm for Lithography Scheduling in Semiconductor DRAM Fab. in 2019 IEEE 15th International Conference on Automation Science and Engineering (CASE). Vancouver, BC, Canada.

Adaptive Genetic Algorithm for Lithography Scheduling in Semiconductor DRAM Fab. / Lee, Chia-Yen; Wu, C. M.

2019 IEEE 15th International Conference on Automation Science and Engineering (CASE). Vancouver, BC, Canada, 2019.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - Adaptive Genetic Algorithm for Lithography Scheduling in Semiconductor DRAM Fab.

AU - Lee, Chia-Yen

AU - Wu, C. M.

PY - 2019

Y1 - 2019

M3 - Conference contribution

BT - 2019 IEEE 15th International Conference on Automation Science and Engineering (CASE)

CY - Vancouver, BC, Canada

ER -

Lee C-Y, Wu CM. Adaptive Genetic Algorithm for Lithography Scheduling in Semiconductor DRAM Fab. In 2019 IEEE 15th International Conference on Automation Science and Engineering (CASE). Vancouver, BC, Canada. 2019