Original language | English |
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Title of host publication | 2019 IEEE 15th International Conference on Automation Science and Engineering (CASE) |
Place of Publication | Vancouver, BC, Canada |
Publication status | Published - 2019 |
Adaptive Genetic Algorithm for Lithography Scheduling in Semiconductor DRAM Fab.
Chia-Yen Lee, C. M. Wu
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution