Adaptive Genetic Algorithm for Lithography Scheduling in Semiconductor DRAM Fab.

Chia-Yen Lee, C. M. Wu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publication2019 IEEE 15th International Conference on Automation Science and Engineering (CASE)
Place of PublicationVancouver, BC, Canada
Publication statusPublished - 2019

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