Al-doped MgZnO/p-AlGaN heterojunction and their application in ultraviolet photodetectors

Kuang Po Hsueh, Po Wei Cheng, Wen Yen Lin, Hsien Chin Chiu, Jinn-Kong Sheu, Yu Hsiang Yeh

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

In this study, n-type Al-doped MgxZn1-xO (AMZO) films were deposited onto p-Al0.08Ga0.92N by using radiofrequency magnetron sputtering followed by annealing at 800°C in nitrogen ambient for 60 s. The film was highly transparent and had transmittances exceeding 95% in the visible region and a sharp absorption edge visible in the ultraviolet region. A high leakage current was obtained in the current-voltage (I-V) characteristics of the GMZO/AlGaN n-p junction diode. The AMZO/AlGaN photodetector based on the AMZO film exhibited a dark current of 1.56 μA at Vbias =-3V. The peak responsivity of the photodetector was approximately 200 nm and a cutoff wavelength was observed at approximately 250 nm.

Original languageEnglish
Title of host publicationInternational Seminar on Photonics, Optics, and Its Applications, ISPhOA 2014
EditorsAulia Nasution
PublisherSPIE
ISBN (Electronic)9781628415599
DOIs
Publication statusPublished - 2015 Jan 1
EventInternational Seminar on Photonics, Optics, and Its Applications, ISPhOA 2014 - Sanur, Bali, Indonesia
Duration: 2014 Oct 142014 Oct 15

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume9444
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Other

OtherInternational Seminar on Photonics, Optics, and Its Applications, ISPhOA 2014
CountryIndonesia
CitySanur, Bali
Period14-10-1414-10-15

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • Cite this

    Hsueh, K. P., Cheng, P. W., Lin, W. Y., Chiu, H. C., Sheu, J-K., & Yeh, Y. H. (2015). Al-doped MgZnO/p-AlGaN heterojunction and their application in ultraviolet photodetectors. In A. Nasution (Ed.), International Seminar on Photonics, Optics, and Its Applications, ISPhOA 2014 [94440K] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 9444). SPIE. https://doi.org/10.1117/12.2074817