Al-doping effect on structural, transport and optical properties of ZnO films by simultaneous RF and DC magnetron sputtering

J. J. Lu; S. Y. Tsai; Y. M. Lu; T. C. Lin; K. J. Gan

doi:10.1016/j.ssc.2009.09.021

Al-doping effect on structural, transport and optical properties of ZnO films by simultaneous RF and DC magnetron sputtering

J. J. Lu, S. Y. Tsai, Y. M. Lu, T. C. Lin, K. J. Gan

Hierarchical Green-Energy Materials Research Center

Research output: Contribution to journal › Article › peer-review

15 Citations (Scopus)

Abstract

Transparent and conductive Al-doped ZnO films have been prepared by simultaneous RF and DC magnetron sputtering. In order to study the properties of the Al-doped ZnO films, we performed X-ray diffraction, X-ray absorption spectroscopy, temperature dependence of electrical resistance and Hall measurements, as well as optical transmission spectroscopy. The results revealed that all the samples were polycrystalline with a strong preferential c-axis orientation. A minimum resistivity of 7.13 × 1 0^{- 3} Ω cm was obtained, and a metallic-type conducting behavior was observed for the film at 50 W. Our present work suggests that the electrical transport property of the Al-doped ZnO films is closely related to the crystallinity. A large number of defects due to poor crystallinity and the induced stress field are able to immobilize the free carrier thereby reducing the conductivity.

Original language	English
Pages (from-to)	2177-2180
Number of pages	4
Journal	Solid State Communications
Volume	149
Issue number	47-48
DOIs	https://doi.org/10.1016/j.ssc.2009.09.021
Publication status	Published - 2009 Dec

All Science Journal Classification (ASJC) codes

General Chemistry
Condensed Matter Physics
Materials Chemistry

Access to Document

10.1016/j.ssc.2009.09.021

Cite this

@article{1d9bb989df8845df9fe4c3f0875c517b,

title = "Al-doping effect on structural, transport and optical properties of ZnO films by simultaneous RF and DC magnetron sputtering",

abstract = "Transparent and conductive Al-doped ZnO films have been prepared by simultaneous RF and DC magnetron sputtering. In order to study the properties of the Al-doped ZnO films, we performed X-ray diffraction, X-ray absorption spectroscopy, temperature dependence of electrical resistance and Hall measurements, as well as optical transmission spectroscopy. The results revealed that all the samples were polycrystalline with a strong preferential c-axis orientation. A minimum resistivity of 7.13 × 1 0- 3 Ω cm was obtained, and a metallic-type conducting behavior was observed for the film at 50 W. Our present work suggests that the electrical transport property of the Al-doped ZnO films is closely related to the crystallinity. A large number of defects due to poor crystallinity and the induced stress field are able to immobilize the free carrier thereby reducing the conductivity.",

author = "Lu, {J. J.} and Tsai, {S. Y.} and Lu, {Y. M.} and Lin, {T. C.} and Gan, {K. J.}",

note = "Funding Information: This work was supported by National Science Council of the Republic of China under contract No. NSC 97-2112-M-168-001-MY2.",

year = "2009",

month = dec,

doi = "10.1016/j.ssc.2009.09.021",

language = "English",

volume = "149",

pages = "2177--2180",

journal = "Solid State Communications",

issn = "0038-1098",

publisher = "Elsevier Limited",

number = "47-48",

}

TY - JOUR

T1 - Al-doping effect on structural, transport and optical properties of ZnO films by simultaneous RF and DC magnetron sputtering

AU - Lu, J. J.

AU - Tsai, S. Y.

AU - Lu, Y. M.

AU - Lin, T. C.

AU - Gan, K. J.

N1 - Funding Information: This work was supported by National Science Council of the Republic of China under contract No. NSC 97-2112-M-168-001-MY2.

PY - 2009/12

Y1 - 2009/12

N2 - Transparent and conductive Al-doped ZnO films have been prepared by simultaneous RF and DC magnetron sputtering. In order to study the properties of the Al-doped ZnO films, we performed X-ray diffraction, X-ray absorption spectroscopy, temperature dependence of electrical resistance and Hall measurements, as well as optical transmission spectroscopy. The results revealed that all the samples were polycrystalline with a strong preferential c-axis orientation. A minimum resistivity of 7.13 × 1 0- 3 Ω cm was obtained, and a metallic-type conducting behavior was observed for the film at 50 W. Our present work suggests that the electrical transport property of the Al-doped ZnO films is closely related to the crystallinity. A large number of defects due to poor crystallinity and the induced stress field are able to immobilize the free carrier thereby reducing the conductivity.

AB - Transparent and conductive Al-doped ZnO films have been prepared by simultaneous RF and DC magnetron sputtering. In order to study the properties of the Al-doped ZnO films, we performed X-ray diffraction, X-ray absorption spectroscopy, temperature dependence of electrical resistance and Hall measurements, as well as optical transmission spectroscopy. The results revealed that all the samples were polycrystalline with a strong preferential c-axis orientation. A minimum resistivity of 7.13 × 1 0- 3 Ω cm was obtained, and a metallic-type conducting behavior was observed for the film at 50 W. Our present work suggests that the electrical transport property of the Al-doped ZnO films is closely related to the crystallinity. A large number of defects due to poor crystallinity and the induced stress field are able to immobilize the free carrier thereby reducing the conductivity.

UR - http://www.scopus.com/inward/record.url?scp=70350097214&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=70350097214&partnerID=8YFLogxK

U2 - 10.1016/j.ssc.2009.09.021

DO - 10.1016/j.ssc.2009.09.021

M3 - Article

AN - SCOPUS:70350097214

SN - 0038-1098

VL - 149

SP - 2177

EP - 2180

JO - Solid State Communications

JF - Solid State Communications

IS - 47-48

ER -

Al-doping effect on structural, transport and optical properties of ZnO films by simultaneous RF and DC magnetron sputtering

Abstract

All Science Journal Classification (ASJC) codes

Access to Document

Other files and links

Fingerprint

Cite this