AlGaN/GaN Enhancement-Mode MOSHEMTs Utilizing Hybrid Gate-Recessed Structure and Ferroelectric Charge Trapping/Storage Stacked LiNbO3/HfO2/Al2O3Structure

Hsin Ying Lee, Chia Hung Lin, Chia Chun Wei, Jan Chi Yang, Edward Yi Chang, Ching Ting Lee

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

Abstract

The hybrid gate-recessed structure and ferroelectric charge trapping/storage stacked structure were used in AlGaN/GaN enhancement-mode metal-oxide-semiconductor high-electron mobility transistors (E-MOSHEMTs). The stacked structure consisted of a bottom 10-nm-thick Al2O3 tunnel oxide layer, a middle 4-nm-thick HfO2 charge trapping/storage layer, and a top 40-nm-thick LiNbO3 ferroelectric blocking layer. Using the postannealing process, a high polarized C+ domain of the pulsed laser-deposited LiNbO3 ferroelectric blocking layer was formed and the interface quality of the stacked structure was improved simultaneously. Consequently, positive threshold voltage for enhancement-mode operation was obtained. By studying the performances of the resulting devices, it was found that enhancement-mode behaviors were observed for initializing gate more than 5 V, and the threshold voltage of 1.6 V was obtained for initializing gate at 12 V. The high-frequency performances of the extrinsic unit gain cutoff frequency of 5.9 GHz and maximum oscillation frequency of 10.1 GHz were obtained. Furthermore, a low normalized noise power density of about 1.9 × 10-14 Hz-1 was achieved for the devices operating at a frequency of 10 Hz, a gate-source voltage of 5 V, and a drain-source voltage of 1 V.

Original languageEnglish
Article number9466375
Pages (from-to)3768-3774
Number of pages7
JournalIEEE Transactions on Electron Devices
Volume68
Issue number8
DOIs
Publication statusPublished - 2021 Aug

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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