Aluminum-doped zinc oxide nanorods and methyl alcohol gas sensor application

Yi Hsing Liu; Shoou Jinn Chang; Lin Tzu Lai; Yung Ping Tu; Sheng Joue Young

doi:10.1007/s00542-020-04856-z

Aluminum-doped zinc oxide nanorods and methyl alcohol gas sensor application

Yi Hsing Liu, Shoou Jinn Chang, Lin Tzu Lai, Yung Ping Tu, Sheng Joue Young

Institute of Microelectronics

Research output: Contribution to journal › Article › peer-review

10 Citations (Scopus)

Abstract

In this paper, we mainly discuss about Al-doped zinc oxide (ZnO) nanorods (NRs) grown by hydrothermal method with low temperature. Glass substrate was grown 100 nm ZnO seed layer by RF magnetron Sputter. Add zinc nitrate hexahydrate [Zn(NO₃)₂·6H₂O] and hexamethylenetetramine (HMT, C₆H₁₂N₄), and add aluminum nitrate [Al(NO₃)₃·9H₂O] for changing conductive properties of ZnO NRs to reach the purpose of doped. Then we used field electron emission scanning electron microscope observing the surface morphology; energy dispersive spectrometer analyze element content; X-ray diffractometer; photoluminescence analyze optical properties; transmission electron microscopy view the internal type and structure of the material. Finally observing the Al-doped ZnO NRs and pure ZnO NRs sensor under methyl alcohol surroundings. The results the Al-doped ZnO NRs sensor were found to be more sensitive than the pure ZnO NRs sensor under methyl alcohol surroundings.

Original language	English
Pages (from-to)	377-382
Number of pages	6
Journal	Microsystem Technologies
Volume	28
Issue number	1
DOIs	https://doi.org/10.1007/s00542-020-04856-z
Publication status	Published - 2022 Jan

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Hardware and Architecture
Electrical and Electronic Engineering

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title = "Aluminum-doped zinc oxide nanorods and methyl alcohol gas sensor application",

abstract = "In this paper, we mainly discuss about Al-doped zinc oxide (ZnO) nanorods (NRs) grown by hydrothermal method with low temperature. Glass substrate was grown 100 nm ZnO seed layer by RF magnetron Sputter. Add zinc nitrate hexahydrate [Zn(NO3)2·6H2O] and hexamethylenetetramine (HMT, C6H12N4), and add aluminum nitrate [Al(NO3)3·9H2O] for changing conductive properties of ZnO NRs to reach the purpose of doped. Then we used field electron emission scanning electron microscope observing the surface morphology; energy dispersive spectrometer analyze element content; X-ray diffractometer; photoluminescence analyze optical properties; transmission electron microscopy view the internal type and structure of the material. Finally observing the Al-doped ZnO NRs and pure ZnO NRs sensor under methyl alcohol surroundings. The results the Al-doped ZnO NRs sensor were found to be more sensitive than the pure ZnO NRs sensor under methyl alcohol surroundings.",

author = "Liu, {Yi Hsing} and Chang, {Shoou Jinn} and Lai, {Lin Tzu} and Tu, {Yung Ping} and Young, {Sheng Joue}",

note = "Publisher Copyright: {\textcopyright} 2020, Springer-Verlag GmbH Germany, part of Springer Nature.",

year = "2022",

month = jan,

doi = "10.1007/s00542-020-04856-z",

language = "English",

volume = "28",

pages = "377--382",

journal = "Microsystem Technologies",

issn = "0946-7076",

publisher = "Springer Verlag",

number = "1",

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TY - JOUR

T1 - Aluminum-doped zinc oxide nanorods and methyl alcohol gas sensor application

AU - Liu, Yi Hsing

AU - Chang, Shoou Jinn

AU - Lai, Lin Tzu

AU - Tu, Yung Ping

AU - Young, Sheng Joue

PY - 2022/1

Y1 - 2022/1

N2 - In this paper, we mainly discuss about Al-doped zinc oxide (ZnO) nanorods (NRs) grown by hydrothermal method with low temperature. Glass substrate was grown 100 nm ZnO seed layer by RF magnetron Sputter. Add zinc nitrate hexahydrate [Zn(NO3)2·6H2O] and hexamethylenetetramine (HMT, C6H12N4), and add aluminum nitrate [Al(NO3)3·9H2O] for changing conductive properties of ZnO NRs to reach the purpose of doped. Then we used field electron emission scanning electron microscope observing the surface morphology; energy dispersive spectrometer analyze element content; X-ray diffractometer; photoluminescence analyze optical properties; transmission electron microscopy view the internal type and structure of the material. Finally observing the Al-doped ZnO NRs and pure ZnO NRs sensor under methyl alcohol surroundings. The results the Al-doped ZnO NRs sensor were found to be more sensitive than the pure ZnO NRs sensor under methyl alcohol surroundings.

AB - In this paper, we mainly discuss about Al-doped zinc oxide (ZnO) nanorods (NRs) grown by hydrothermal method with low temperature. Glass substrate was grown 100 nm ZnO seed layer by RF magnetron Sputter. Add zinc nitrate hexahydrate [Zn(NO3)2·6H2O] and hexamethylenetetramine (HMT, C6H12N4), and add aluminum nitrate [Al(NO3)3·9H2O] for changing conductive properties of ZnO NRs to reach the purpose of doped. Then we used field electron emission scanning electron microscope observing the surface morphology; energy dispersive spectrometer analyze element content; X-ray diffractometer; photoluminescence analyze optical properties; transmission electron microscopy view the internal type and structure of the material. Finally observing the Al-doped ZnO NRs and pure ZnO NRs sensor under methyl alcohol surroundings. The results the Al-doped ZnO NRs sensor were found to be more sensitive than the pure ZnO NRs sensor under methyl alcohol surroundings.

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DO - 10.1007/s00542-020-04856-z

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SN - 0946-7076

VL - 28

SP - 377

EP - 382

JO - Microsystem Technologies

JF - Microsystem Technologies

IS - 1

ER -

Aluminum-doped zinc oxide nanorods and methyl alcohol gas sensor application

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