Aluminum-doped zinc oxide nanorods and methyl alcohol gas sensor application

Yi Hsing Liu, Shoou Jinn Chang, Lin Tzu Lai, Yung Ping Tu, Sheng Joue Young

Research output: Contribution to journalArticle


In this paper, we mainly discuss about Al-doped zinc oxide (ZnO) nanorods (NRs) grown by hydrothermal method with low temperature. Glass substrate was grown 100 nm ZnO seed layer by RF magnetron Sputter. Add zinc nitrate hexahydrate [Zn(NO3)2·6H2O] and hexamethylenetetramine (HMT, C6H12N4), and add aluminum nitrate [Al(NO3)3·9H2O] for changing conductive properties of ZnO NRs to reach the purpose of doped. Then we used field electron emission scanning electron microscope observing the surface morphology; energy dispersive spectrometer analyze element content; X-ray diffractometer; photoluminescence analyze optical properties; transmission electron microscopy view the internal type and structure of the material. Finally observing the Al-doped ZnO NRs and pure ZnO NRs sensor under methyl alcohol surroundings. The results the Al-doped ZnO NRs sensor were found to be more sensitive than the pure ZnO NRs sensor under methyl alcohol surroundings.

Original languageEnglish
JournalMicrosystem Technologies
Publication statusAccepted/In press - 2020 Jan 1


All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Hardware and Architecture
  • Electrical and Electronic Engineering

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