Original language | English |
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Pages (from-to) | 11-17 |
Number of pages | 7 |
Journal | Proceedings of SPIE - The International Society for Optical Engineering |
Volume | 1805 |
DOIs | |
Publication status | Published - 1993 May 21 |
Event | Submicrometer Metallization: Challenges, Opportunities, and Limitations 1992 - San Jose, United States Duration: 1992 Sept 20 → 1992 Sept 25 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering