An Algorithm of Multi-Subpopulation Parameters with Hybrid Estimation of Distribution for Semiconductor Scheduling with Constrained Waiting Time

Hung Kai Wang, Chen Fu Chien, Mitsuo Gen

Research output: Contribution to journalArticlepeer-review

29 Citations (Scopus)

Abstract

Scheduling for wafer fabrication of advanced technology nodes entails complicated constraints such as limited waiting times. Focusing on real settings, this paper aims to develop a novel genetic algorithm of multi-subpopulation parameters with hybrid estimation of distribution (MSPHEDA) to solve the present problem effectively and efficiently. To estimate the validity of this approach, ten scenarios were simulated on the basis of empirical data as the basis to compare the performance of MSPHEDA and other heuristic methods for minimizing makespan and reducing the total exceeded limited waiting time. The results have shown practical viability of the proposed approach.

Original languageEnglish
Article number7114308
Pages (from-to)353-366
Number of pages14
JournalIEEE Transactions on Semiconductor Manufacturing
Volume28
Issue number3
DOIs
Publication statusPublished - 2015 Aug 1

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering

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