An application of Mueller matrix polarimetry for characterising properties of thin film with surface roughness

Quoc Hung Phan; Yu Lung Lo

doi:10.1051/matecconf/20153205006

An application of Mueller matrix polarimetry for characterising properties of thin film with surface roughness

Quoc Hung Phan, Yu Lung Lo

Department of Mechanical Engineering

Research output: Contribution to journal › Conference article › peer-review

2 Citations (Scopus)

Abstract

A new Mueller ellipsometry method was proposed for characterising the optical properties of thin films with rough surfaces. The validity of the proposed study is demonstrated by comparing the experimental results of the refractive index and thickness of thin film with the analytical results. Furthermore, the proposed study extracted successfully the surface roughness of thin film samples in a non contact optical manner. It provides a potential solution to replace the well-known effective approximate medium (EMA) method in dealing with the fine coarse rough surface thin film.

Original language	English
Article number	05006
Journal	MATEC Web of Conferences
Volume	32
DOIs	https://doi.org/10.1051/matecconf/20153205006
Publication status	Published - 2015 Dec 2
Event	International Symposium of Optomechatronics Technology, ISOT 2015 - Neuchatel, Switzerland Duration: 2015 Oct 14 → 2015 Oct 16

All Science Journal Classification (ASJC) codes

General Chemistry
General Materials Science
General Engineering

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10.1051/matecconf/20153205006

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abstract = "A new Mueller ellipsometry method was proposed for characterising the optical properties of thin films with rough surfaces. The validity of the proposed study is demonstrated by comparing the experimental results of the refractive index and thickness of thin film with the analytical results. Furthermore, the proposed study extracted successfully the surface roughness of thin film samples in a non contact optical manner. It provides a potential solution to replace the well-known effective approximate medium (EMA) method in dealing with the fine coarse rough surface thin film.",

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AU - Phan, Quoc Hung

AU - Lo, Yu Lung

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N2 - A new Mueller ellipsometry method was proposed for characterising the optical properties of thin films with rough surfaces. The validity of the proposed study is demonstrated by comparing the experimental results of the refractive index and thickness of thin film with the analytical results. Furthermore, the proposed study extracted successfully the surface roughness of thin film samples in a non contact optical manner. It provides a potential solution to replace the well-known effective approximate medium (EMA) method in dealing with the fine coarse rough surface thin film.

AB - A new Mueller ellipsometry method was proposed for characterising the optical properties of thin films with rough surfaces. The validity of the proposed study is demonstrated by comparing the experimental results of the refractive index and thickness of thin film with the analytical results. Furthermore, the proposed study extracted successfully the surface roughness of thin film samples in a non contact optical manner. It provides a potential solution to replace the well-known effective approximate medium (EMA) method in dealing with the fine coarse rough surface thin film.

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SN - 2261-236X

VL - 32

JO - MATEC Web of Conferences

JF - MATEC Web of Conferences

M1 - 05006

T2 - International Symposium of Optomechatronics Technology, ISOT 2015

Y2 - 14 October 2015 through 16 October 2015

ER -

An application of Mueller matrix polarimetry for characterising properties of thin film with surface roughness

Abstract

All Science Journal Classification (ASJC) codes

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