TY - GEN
T1 - An automated demolding system for PDMS microstructures with high aspect ratio
AU - Chen, Wenjie
AU - Liu, Chih Hsing
PY - 2014/1/1
Y1 - 2014/1/1
N2 - This paper presents a roller-based peel-off demolding method and system for demolding of the polydimethylsiloxane (PDMS) micro pillars with high aspect ratio (6:1). The method can reduce the maximum stress exerted on the microstructures during the step of separating the PDMS film from the mold. Therefore the yield rate can be greatly increased. In this paper, the peel-off demolding process has been analyzed, and the major failure mode of the process is identified as the lateral collapse of the micro pillars. The effects of several process parameters (such as cycle time, sample thickness and temperature) on yield rate are identified. A lower demolding speed, larger thickness and lower temperature of the sample can yield better results. A prototype of the automated demolding system has been developed. The experimental results show that the system can achieve stable results with 99% yield rate.
AB - This paper presents a roller-based peel-off demolding method and system for demolding of the polydimethylsiloxane (PDMS) micro pillars with high aspect ratio (6:1). The method can reduce the maximum stress exerted on the microstructures during the step of separating the PDMS film from the mold. Therefore the yield rate can be greatly increased. In this paper, the peel-off demolding process has been analyzed, and the major failure mode of the process is identified as the lateral collapse of the micro pillars. The effects of several process parameters (such as cycle time, sample thickness and temperature) on yield rate are identified. A lower demolding speed, larger thickness and lower temperature of the sample can yield better results. A prototype of the automated demolding system has been developed. The experimental results show that the system can achieve stable results with 99% yield rate.
UR - http://www.scopus.com/inward/record.url?scp=84949924887&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84949924887&partnerID=8YFLogxK
U2 - 10.1109/ICARCV.2014.7064486
DO - 10.1109/ICARCV.2014.7064486
M3 - Conference contribution
AN - SCOPUS:84949924887
T3 - 2014 13th International Conference on Control Automation Robotics and Vision, ICARCV 2014
SP - 1201
EP - 1206
BT - 2014 13th International Conference on Control Automation Robotics and Vision, ICARCV 2014
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2014 13th International Conference on Control Automation Robotics and Vision, ICARCV 2014
Y2 - 10 December 2014 through 12 December 2014
ER -