An automated demolding system for PDMS microstructures with high aspect ratio

Wenjie Chen, Chih Hsing Liu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This paper presents a roller-based peel-off demolding method and system for demolding of the polydimethylsiloxane (PDMS) micro pillars with high aspect ratio (6:1). The method can reduce the maximum stress exerted on the microstructures during the step of separating the PDMS film from the mold. Therefore the yield rate can be greatly increased. In this paper, the peel-off demolding process has been analyzed, and the major failure mode of the process is identified as the lateral collapse of the micro pillars. The effects of several process parameters (such as cycle time, sample thickness and temperature) on yield rate are identified. A lower demolding speed, larger thickness and lower temperature of the sample can yield better results. A prototype of the automated demolding system has been developed. The experimental results show that the system can achieve stable results with 99% yield rate.

Original languageEnglish
Title of host publication2014 13th International Conference on Control Automation Robotics and Vision, ICARCV 2014
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1201-1206
Number of pages6
ISBN (Electronic)9781479951994
DOIs
Publication statusPublished - 2014 Jan 1
Event2014 13th International Conference on Control Automation Robotics and Vision, ICARCV 2014 - Singapore, Singapore
Duration: 2014 Dec 102014 Dec 12

Publication series

Name2014 13th International Conference on Control Automation Robotics and Vision, ICARCV 2014

Other

Other2014 13th International Conference on Control Automation Robotics and Vision, ICARCV 2014
CountrySingapore
CitySingapore
Period14-12-1014-12-12

All Science Journal Classification (ASJC) codes

  • Computer Vision and Pattern Recognition
  • Human-Computer Interaction
  • Artificial Intelligence
  • Control and Systems Engineering

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