An e-diagnostics framework with security considerations for semiconductor factories

Min Hsiung Hung; Rui Wen Ho; Fan Tien Cheng

An e-diagnostics framework with security considerations for semiconductor factories

Min Hsiung Hung, Rui Wen Ho, Fan Tien Cheng

Institute of Manufacturing Information and Systems

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Citations (Scopus)

Abstract

In this paper, new-generation software technologies and object-oriented technologies, such as Web Services, XML signature, XML encryption, UML, etc., are used to develop an e-Diagnostics framework for semiconductor factories. The proposed framework can achieve the automaton of diagnostic processes and the integration of diagnostics information under a secure communication infrastructure. Specifically, several measures, such as single sign-on authentication and authorization, confirmation of data accuracy, assurance of information confidentiality, management of system users, and auditing of system operations, are designed to enhance the overall system security. The proposed framework can be applied to construct e-Diagnostics systems for the semiconductor industry.

Original language	English
Title of host publication	2004 Semiconductor Manufacturing Technology Workshop Proceedings, SMTW
Pages	37-40
Number of pages	4
Publication status	Published - 2004 Dec 1
Event	2004 Semiconductor Manufacturing Technology Workshop Proceedings, SMTW - , Taiwan Duration: 2004 Sep 9 → 2004 Sep 10

Publication series

Name	2004 Semiconductor Manufacturing Technology Workshop Proceedings, SMTW

Other

Other	2004 Semiconductor Manufacturing Technology Workshop Proceedings, SMTW
Country	Taiwan
Period	04-09-09 → 04-09-10

All Science Journal Classification (ASJC) codes

Engineering(all)

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Cite this

Hung, M. H., Ho, R. W., & Cheng, F. T. (2004). An e-diagnostics framework with security considerations for semiconductor factories. In 2004 Semiconductor Manufacturing Technology Workshop Proceedings, SMTW (pp. 37-40). (2004 Semiconductor Manufacturing Technology Workshop Proceedings, SMTW).

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An e-diagnostics framework with security considerations for semiconductor factories. / Hung, Min Hsiung; Ho, Rui Wen; Cheng, Fan Tien.

2004 Semiconductor Manufacturing Technology Workshop Proceedings, SMTW. 2004. p. 37-40 (2004 Semiconductor Manufacturing Technology Workshop Proceedings, SMTW).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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N2 - In this paper, new-generation software technologies and object-oriented technologies, such as Web Services, XML signature, XML encryption, UML, etc., are used to develop an e-Diagnostics framework for semiconductor factories. The proposed framework can achieve the automaton of diagnostic processes and the integration of diagnostics information under a secure communication infrastructure. Specifically, several measures, such as single sign-on authentication and authorization, confirmation of data accuracy, assurance of information confidentiality, management of system users, and auditing of system operations, are designed to enhance the overall system security. The proposed framework can be applied to construct e-Diagnostics systems for the semiconductor industry.

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