TY - GEN
T1 - An e-diagnostics framework with security considerations for semiconductor factories
AU - Hung, Min Hsiung
AU - Ho, Rui Wen
AU - Cheng, Fan Tien
PY - 2004/12/1
Y1 - 2004/12/1
N2 - In this paper, new-generation software technologies and object-oriented technologies, such as Web Services, XML signature, XML encryption, UML, etc., are used to develop an e-Diagnostics framework for semiconductor factories. The proposed framework can achieve the automaton of diagnostic processes and the integration of diagnostics information under a secure communication infrastructure. Specifically, several measures, such as single sign-on authentication and authorization, confirmation of data accuracy, assurance of information confidentiality, management of system users, and auditing of system operations, are designed to enhance the overall system security. The proposed framework can be applied to construct e-Diagnostics systems for the semiconductor industry.
AB - In this paper, new-generation software technologies and object-oriented technologies, such as Web Services, XML signature, XML encryption, UML, etc., are used to develop an e-Diagnostics framework for semiconductor factories. The proposed framework can achieve the automaton of diagnostic processes and the integration of diagnostics information under a secure communication infrastructure. Specifically, several measures, such as single sign-on authentication and authorization, confirmation of data accuracy, assurance of information confidentiality, management of system users, and auditing of system operations, are designed to enhance the overall system security. The proposed framework can be applied to construct e-Diagnostics systems for the semiconductor industry.
UR - http://www.scopus.com/inward/record.url?scp=17044429709&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=17044429709&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:17044429709
SN - 0780384695
T3 - 2004 Semiconductor Manufacturing Technology Workshop Proceedings, SMTW
SP - 37
EP - 40
BT - 2004 Semiconductor Manufacturing Technology Workshop Proceedings, SMTW
T2 - 2004 Semiconductor Manufacturing Technology Workshop Proceedings, SMTW
Y2 - 9 September 2004 through 10 September 2004
ER -