An e-diagnostics framework with security considerations for semiconductor factories

Min Hsiung Hung, Rui Wen Ho, Fan Tien Cheng

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

In this paper, new-generation software technologies and object-oriented technologies, such as Web Services, XML signature, XML encryption, UML, etc., are used to develop an e-Diagnostics framework for semiconductor factories. The proposed framework can achieve the automaton of diagnostic processes and the integration of diagnostics information under a secure communication infrastructure. Specifically, several measures, such as single sign-on authentication and authorization, confirmation of data accuracy, assurance of information confidentiality, management of system users, and auditing of system operations, are designed to enhance the overall system security. The proposed framework can be applied to construct e-Diagnostics systems for the semiconductor industry.

Original languageEnglish
Title of host publication2004 Semiconductor Manufacturing Technology Workshop Proceedings, SMTW
Pages37-40
Number of pages4
Publication statusPublished - 2004 Dec 1
Event2004 Semiconductor Manufacturing Technology Workshop Proceedings, SMTW - , Taiwan
Duration: 2004 Sep 92004 Sep 10

Publication series

Name2004 Semiconductor Manufacturing Technology Workshop Proceedings, SMTW

Other

Other2004 Semiconductor Manufacturing Technology Workshop Proceedings, SMTW
CountryTaiwan
Period04-09-0904-09-10

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Fingerprint Dive into the research topics of 'An e-diagnostics framework with security considerations for semiconductor factories'. Together they form a unique fingerprint.

  • Cite this

    Hung, M. H., Ho, R. W., & Cheng, F. T. (2004). An e-diagnostics framework with security considerations for semiconductor factories. In 2004 Semiconductor Manufacturing Technology Workshop Proceedings, SMTW (pp. 37-40). (2004 Semiconductor Manufacturing Technology Workshop Proceedings, SMTW).