TY - GEN
T1 - An efficient tagging point selection algorithm to facilitate OPC process
AU - Chen, Lih-Shyang
AU - Lin, Lian Yong
AU - Tang, Jing Jou
AU - Sheu, Meng Lieh
AU - Chen, Yong Zhi
PY - 2010/12/1
Y1 - 2010/12/1
N2 - The rapid advance of resolution enhancement technique (RET) has driven the integrated circuits to the nanometer-scale era. Optical proximity correction (OPC) is one of the RET techniques that can be employed to reshape the mask patterns for correcting the distortion due to the optical proximity effect (OPE). In this paper, an Optical Performance Index (OPI) is proposed as an evaluation criteria for ope performance. Also, an efficient tagging point selection algorithm is developed to facilitate the ope process. Based on the OPI and selection algorithm, the tagging points for ope can be easily located on either the regular patterns, e.g., rectangle or polygon, or the irregular patterns such as convex or concave patterns. Experimental results show that the quantity of storage and computing time can be dramatically reduced.
AB - The rapid advance of resolution enhancement technique (RET) has driven the integrated circuits to the nanometer-scale era. Optical proximity correction (OPC) is one of the RET techniques that can be employed to reshape the mask patterns for correcting the distortion due to the optical proximity effect (OPE). In this paper, an Optical Performance Index (OPI) is proposed as an evaluation criteria for ope performance. Also, an efficient tagging point selection algorithm is developed to facilitate the ope process. Based on the OPI and selection algorithm, the tagging points for ope can be easily located on either the regular patterns, e.g., rectangle or polygon, or the irregular patterns such as convex or concave patterns. Experimental results show that the quantity of storage and computing time can be dramatically reduced.
UR - http://www.scopus.com/inward/record.url?scp=78751474342&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=78751474342&partnerID=8YFLogxK
U2 - 10.1109/ISNE.2010.5669192
DO - 10.1109/ISNE.2010.5669192
M3 - Conference contribution
AN - SCOPUS:78751474342
SN - 9781424466948
T3 - 2010 International Symposium on Next-Generation Electronics, ISNE 2010 - Conference Program
SP - 85
EP - 88
BT - 2010 International Symposium on Next-Generation Electronics, ISNE 2010 - Conference Program
T2 - 2010 International Symposium on Next-Generation Electronics, ISNE 2010
Y2 - 18 November 2010 through 19 November 2010
ER -