An efficient tagging point selection algorithm to facilitate OPC process

Lih-Shyang Chen, Lian Yong Lin, Jing Jou Tang, Meng Lieh Sheu, Yong Zhi Chen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The rapid advance of resolution enhancement technique (RET) has driven the integrated circuits to the nanometer-scale era. Optical proximity correction (OPC) is one of the RET techniques that can be employed to reshape the mask patterns for correcting the distortion due to the optical proximity effect (OPE). In this paper, an Optical Performance Index (OPI) is proposed as an evaluation criteria for ope performance. Also, an efficient tagging point selection algorithm is developed to facilitate the ope process. Based on the OPI and selection algorithm, the tagging points for ope can be easily located on either the regular patterns, e.g., rectangle or polygon, or the irregular patterns such as convex or concave patterns. Experimental results show that the quantity of storage and computing time can be dramatically reduced.

Original languageEnglish
Title of host publication2010 International Symposium on Next-Generation Electronics, ISNE 2010 - Conference Program
Pages85-88
Number of pages4
DOIs
Publication statusPublished - 2010 Dec 1
Event2010 International Symposium on Next-Generation Electronics, ISNE 2010 - Kaohsiung, Taiwan
Duration: 2010 Nov 182010 Nov 19

Publication series

Name2010 International Symposium on Next-Generation Electronics, ISNE 2010 - Conference Program

Other

Other2010 International Symposium on Next-Generation Electronics, ISNE 2010
CountryTaiwan
CityKaohsiung
Period10-11-1810-11-19

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

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    Chen, L-S., Lin, L. Y., Tang, J. J., Sheu, M. L., & Chen, Y. Z. (2010). An efficient tagging point selection algorithm to facilitate OPC process. In 2010 International Symposium on Next-Generation Electronics, ISNE 2010 - Conference Program (pp. 85-88). [5669192] (2010 International Symposium on Next-Generation Electronics, ISNE 2010 - Conference Program). https://doi.org/10.1109/ISNE.2010.5669192