An efficient tagging point selection algorithm to facilitate OPC process

Lih-Shyang Chen; Lian Yong Lin; Jing Jou Tang; Meng Lieh Sheu; Yong Zhi Chen

doi:10.1109/ISNE.2010.5669192

An efficient tagging point selection algorithm to facilitate OPC process

Lih-Shyang Chen, Lian Yong Lin, Jing Jou Tang, Meng Lieh Sheu, Yong Zhi Chen

Institute of Computer and Communication Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

The rapid advance of resolution enhancement technique (RET) has driven the integrated circuits to the nanometer-scale era. Optical proximity correction (OPC) is one of the RET techniques that can be employed to reshape the mask patterns for correcting the distortion due to the optical proximity effect (OPE). In this paper, an Optical Performance Index (OPI) is proposed as an evaluation criteria for ope performance. Also, an efficient tagging point selection algorithm is developed to facilitate the ope process. Based on the OPI and selection algorithm, the tagging points for ope can be easily located on either the regular patterns, e.g., rectangle or polygon, or the irregular patterns such as convex or concave patterns. Experimental results show that the quantity of storage and computing time can be dramatically reduced.

Original language	English
Title of host publication	2010 International Symposium on Next-Generation Electronics, ISNE 2010 - Conference Program
Pages	85-88
Number of pages	4
DOIs	https://doi.org/10.1109/ISNE.2010.5669192
Publication status	Published - 2010 Dec 1
Event	2010 International Symposium on Next-Generation Electronics, ISNE 2010 - Kaohsiung, Taiwan Duration: 2010 Nov 18 → 2010 Nov 19

Publication series

Name	2010 International Symposium on Next-Generation Electronics, ISNE 2010 - Conference Program

Other

Other	2010 International Symposium on Next-Generation Electronics, ISNE 2010
Country	Taiwan
City	Kaohsiung
Period	10-11-18 → 10-11-19

All Science Journal Classification (ASJC) codes

Electrical and Electronic Engineering

Access to Document

10.1109/ISNE.2010.5669192

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Chen, L-S., Lin, L. Y., Tang, J. J., Sheu, M. L., & Chen, Y. Z. (2010). An efficient tagging point selection algorithm to facilitate OPC process. In 2010 International Symposium on Next-Generation Electronics, ISNE 2010 - Conference Program (pp. 85-88). [5669192] (2010 International Symposium on Next-Generation Electronics, ISNE 2010 - Conference Program). https://doi.org/10.1109/ISNE.2010.5669192

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title = "An efficient tagging point selection algorithm to facilitate OPC process",

abstract = "The rapid advance of resolution enhancement technique (RET) has driven the integrated circuits to the nanometer-scale era. Optical proximity correction (OPC) is one of the RET techniques that can be employed to reshape the mask patterns for correcting the distortion due to the optical proximity effect (OPE). In this paper, an Optical Performance Index (OPI) is proposed as an evaluation criteria for ope performance. Also, an efficient tagging point selection algorithm is developed to facilitate the ope process. Based on the OPI and selection algorithm, the tagging points for ope can be easily located on either the regular patterns, e.g., rectangle or polygon, or the irregular patterns such as convex or concave patterns. Experimental results show that the quantity of storage and computing time can be dramatically reduced.",

author = "Lih-Shyang Chen and Lin, {Lian Yong} and Tang, {Jing Jou} and Sheu, {Meng Lieh} and Chen, {Yong Zhi}",

year = "2010",

month = dec,

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doi = "10.1109/ISNE.2010.5669192",

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booktitle = "2010 International Symposium on Next-Generation Electronics, ISNE 2010 - Conference Program",

note = "2010 International Symposium on Next-Generation Electronics, ISNE 2010 ; Conference date: 18-11-2010 Through 19-11-2010",

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Chen, L-S, Lin, LY, Tang, JJ, Sheu, ML & Chen, YZ 2010, An efficient tagging point selection algorithm to facilitate OPC process. in 2010 International Symposium on Next-Generation Electronics, ISNE 2010 - Conference Program., 5669192, 2010 International Symposium on Next-Generation Electronics, ISNE 2010 - Conference Program, pp. 85-88, 2010 International Symposium on Next-Generation Electronics, ISNE 2010, Kaohsiung, Taiwan, 10-11-18. https://doi.org/10.1109/ISNE.2010.5669192

An efficient tagging point selection algorithm to facilitate OPC process. / Chen, Lih-Shyang; Lin, Lian Yong; Tang, Jing Jou; Sheu, Meng Lieh; Chen, Yong Zhi.

2010 International Symposium on Next-Generation Electronics, ISNE 2010 - Conference Program. 2010. p. 85-88 5669192 (2010 International Symposium on Next-Generation Electronics, ISNE 2010 - Conference Program).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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AB - The rapid advance of resolution enhancement technique (RET) has driven the integrated circuits to the nanometer-scale era. Optical proximity correction (OPC) is one of the RET techniques that can be employed to reshape the mask patterns for correcting the distortion due to the optical proximity effect (OPE). In this paper, an Optical Performance Index (OPI) is proposed as an evaluation criteria for ope performance. Also, an efficient tagging point selection algorithm is developed to facilitate the ope process. Based on the OPI and selection algorithm, the tagging points for ope can be easily located on either the regular patterns, e.g., rectangle or polygon, or the irregular patterns such as convex or concave patterns. Experimental results show that the quantity of storage and computing time can be dramatically reduced.

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Chen L-S, Lin LY, Tang JJ, Sheu ML, Chen YZ. An efficient tagging point selection algorithm to facilitate OPC process. In 2010 International Symposium on Next-Generation Electronics, ISNE 2010 - Conference Program. 2010. p. 85-88. 5669192. (2010 International Symposium on Next-Generation Electronics, ISNE 2010 - Conference Program). https://doi.org/10.1109/ISNE.2010.5669192