An environmentally friendly etching agent: Vapor from hot electron-activated liquid water

Hsiao Chien Chen, Fu Der Mai, Kuang Hsuan Yang, Hui Yen Tsai, Chih Ping Yang, Chien Chung Chen, Chao Hsuan Chen, Yu Chuan Liu

Research output: Contribution to journalArticlepeer-review

14 Citations (Scopus)

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Engineering & Materials Science

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