An inverse problem of estimating the Biot number in deep X-ray lithography

W. J. Chang, W. L. Chen, Y. C. Yang, H. L. Lee

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

In this study, an inverse algorithm based on the conjugate gradient method and the discrepancy principle is applied to estimate the unknown space- and time-dependent Biot number in deep X-ray lithography using temperature measurements. It is assumed that no prior information is available on the functional form of the unknown Biot number; hence, the procedure is classified as the function estimation in the inverse calculation. The accuracy of the inverse analysis is examined by using simulated exact and inexact temperature measurements. Results show that an excellent estimation of the space- and time-dependent Biot number can be obtained for the test case considered in this study.

Original languageEnglish
Pages (from-to)155-162
Number of pages8
JournalApplied Physics B: Lasers and Optics
Volume90
Issue number1
DOIs
Publication statusPublished - 2008 Jan 1

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)
  • Physics and Astronomy(all)

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