TY - GEN
T1 - AN INVESTIGATION OF MICROSTRUCTURE AND MICRODYNAMICS OF FLUID FLOW IN MEMS
AU - Lanzillotto, Ann Marie
AU - Leu, Tzong Shyng
AU - Amabile, Michael
AU - Wildes, Richard
AU - Dunsmuir, John
N1 - Funding Information:
The authors wish to thank Dr. Mark Zdeblick at Redwood Microsystems and Dr. Hal Jerman from EG&G IC Sensors for providing the microvalves used in this work as well as technical assistance and helpful discussions. Likewise, we wish to thank Mr. Jeff Melzak and Prof. Mehran Mehregany at CWRU for providing the Si v-groove chips and technical assistance. We also acknowledge with thanks the support of this work by Dr. Ken Gabriel at DARPA/ETO under Contract No. DABT63-95-C-0057.
Funding Information:
The authors wish to thank Dr. Mark Zdeblick at Redwood Microsystems and Dr. Hal Jerman from EG&G IC Sensors for providing the microvalves used in this work as well as technical assistance and helpful discussions. Likewise, we wish to thank Mr. Jeff Melzak and Prof. Mehran Mehregany at CWRU for providing the Si v-groove chips and technical assistance. We also acknowledge with thanks the support of this work by Dr. Ken Gabriel at DARPA/ETO under Contract No. DABT63-95- C-0057.
Publisher Copyright:
© 1996 American Society of Mechanical Engineers (ASME). All rights reserved.
PY - 1996
Y1 - 1996
N2 - This paper reviews x-ray imaging, visualization and analysis technologies which were utilized in an investigation of microstructure and micromotion in fluidic microsystems. These systems include fluidic microvalves, silicon v-groove microchannels and capillary tubes. Specifically, we have visualized the 3-D internal microstructure of Redwood Microsystems Fluistor microvalves and EG&G IC Sensors bimetal microvalve using x-ray microtomography and a massively parallel supercomputer. In other experiments, microradiography was used to image fluid transport through the valves as well as actuation. To better understand the microdynamics of flow, we have also studied the displacement of fluids in Si v-grooves and found that capillarity effects may be dominant. Finally, we discuss methods to visualize and measure steady-state flow in microchannels through the use of emulsions. The detailed flow patterns are directly viewable by the motion of the droplets. Computer vision motion analysis is used to recover the corresponding flow fields and velocity profiles.
AB - This paper reviews x-ray imaging, visualization and analysis technologies which were utilized in an investigation of microstructure and micromotion in fluidic microsystems. These systems include fluidic microvalves, silicon v-groove microchannels and capillary tubes. Specifically, we have visualized the 3-D internal microstructure of Redwood Microsystems Fluistor microvalves and EG&G IC Sensors bimetal microvalve using x-ray microtomography and a massively parallel supercomputer. In other experiments, microradiography was used to image fluid transport through the valves as well as actuation. To better understand the microdynamics of flow, we have also studied the displacement of fluids in Si v-grooves and found that capillarity effects may be dominant. Finally, we discuss methods to visualize and measure steady-state flow in microchannels through the use of emulsions. The detailed flow patterns are directly viewable by the motion of the droplets. Computer vision motion analysis is used to recover the corresponding flow fields and velocity profiles.
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U2 - 10.1115/IMECE1996-0695
DO - 10.1115/IMECE1996-0695
M3 - Conference contribution
AN - SCOPUS:85169167701
T3 - ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)
SP - 789
EP - 796
BT - Aerospace
PB - American Society of Mechanical Engineers (ASME)
T2 - ASME 1996 International Mechanical Engineering Congress and Exposition, IMECE 1996
Y2 - 17 November 1996 through 22 November 1996
ER -