Analysis and design of full-bridge LC parallel resonant plasma driver with variable-inductor based phase control

Ray Lee Lin, Min Han Lee

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

This paper presents the analysis and design of the full-bridge (FB) LC parallel resonant plasma driver at the radio-frequency (RF) operation with variable-inductor based phase control scheme. Since the switching frequency of the RF plasma module is mainly fixed at 13.56MHz for EMC regulation, the variable-inductor control scheme can adjust the transconductance amplitude to enable load-current regulation. Additionally, in order to have minimal conduction loss on the switches, the design criterion of the required dead-time for ZVS condition with the minimal circulating current of the LC parallel resonant tank is required. Based on the equivalent circuit models of the RF plasma module described prior work, the analysis and design of the driver for the RF plasma module are presented. Finally, by using the SIMPLIS® simulation software, the FB LC parallel resonant plasma driver with the variable-inductor based phase control is simulated to validate the achievement of required functions. Furthermore, the dead-times and lagging phases are obtained from the simulation results, which are compared with the calculated results to validate the feasibility of design criterion.

Original languageEnglish
Title of host publicationProceedings - IECON 2010, 36th Annual Conference of the IEEE Industrial Electronics Society
Pages77-82
Number of pages6
DOIs
Publication statusPublished - 2010 Dec 1
Event36th Annual Conference of the IEEE Industrial Electronics Society, IECON 2010 - Glendale, AZ, United States
Duration: 2010 Nov 72010 Nov 10

Publication series

NameIECON Proceedings (Industrial Electronics Conference)

Other

Other36th Annual Conference of the IEEE Industrial Electronics Society, IECON 2010
CountryUnited States
CityGlendale, AZ
Period10-11-0710-11-10

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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