Analysis and fabrication of reciprocal motors applied for microgyroscopes

Nan-Chyuan Tsai, Jiun Sheng Liou, Chih Che Lin, Tuan Li

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

For microgyroscopes, the angular rate detection components have to oscillate forward and backward, alternatively. An innovative design of a microelectromagnetic drive module is proposed to make a II-type thin disk reciprocally and efficiently rotate within a certain of angular interval. Twelve electromagnetic (EM) poles, with iron cores at the center and wound by electroplated copper wires, enclosing the thin disk are designed to provide the magnetic drive power. An isotropic etching technique is employed to fabricate the high-aspect-ratio trench, housing of the follow-up electroplated copper, so that the contact angle of wire against the trench can be increased and the potential defect of cavities and pores within the wire can be prevented. On the other hand, a II-type thin disk, with a central bearing and a set of auxiliary bushings, is designed to conduct the pitch motion as an angular excitation, in addition to spinning, is exerted on the gyroscope. That is, the angular motion of the disk is two-dimensional: spinning, driven by the EM poles, and tilting, to respond to the exerted angular rate due to Coriolis effect. The efficacy of the micromagnetic drive module is verified by theoretical analysis and computer simulations by the commercial software, Ansoft Maxewll. In comparison to the conventional planar windings in microscale systems, the magnetic drive force is increased by 150%.

Original languageEnglish
Article number043046
JournalJournal of Micro/Nanolithography, MEMS, and MOEMS
Volume8
Issue number4
DOIs
Publication statusPublished - 2009 Jan 1

Fingerprint

Fabrication
fabrication
wire
Wire
metal spinning
Copper
Poles
Bearings (structural)
poles
modules
Coriolis effect
bushings
electromagnetism
copper
Bushings
Gyroscopes
gyroscopes
angular velocity
high aspect ratio
microbalances

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

@article{0fc3d719aaf744cbb52eb67020625940,
title = "Analysis and fabrication of reciprocal motors applied for microgyroscopes",
abstract = "For microgyroscopes, the angular rate detection components have to oscillate forward and backward, alternatively. An innovative design of a microelectromagnetic drive module is proposed to make a II-type thin disk reciprocally and efficiently rotate within a certain of angular interval. Twelve electromagnetic (EM) poles, with iron cores at the center and wound by electroplated copper wires, enclosing the thin disk are designed to provide the magnetic drive power. An isotropic etching technique is employed to fabricate the high-aspect-ratio trench, housing of the follow-up electroplated copper, so that the contact angle of wire against the trench can be increased and the potential defect of cavities and pores within the wire can be prevented. On the other hand, a II-type thin disk, with a central bearing and a set of auxiliary bushings, is designed to conduct the pitch motion as an angular excitation, in addition to spinning, is exerted on the gyroscope. That is, the angular motion of the disk is two-dimensional: spinning, driven by the EM poles, and tilting, to respond to the exerted angular rate due to Coriolis effect. The efficacy of the micromagnetic drive module is verified by theoretical analysis and computer simulations by the commercial software, Ansoft Maxewll. In comparison to the conventional planar windings in microscale systems, the magnetic drive force is increased by 150{\%}.",
author = "Nan-Chyuan Tsai and Liou, {Jiun Sheng} and Lin, {Chih Che} and Tuan Li",
year = "2009",
month = "1",
day = "1",
doi = "10.1117/1.3274611",
language = "English",
volume = "8",
journal = "Journal of Micro/ Nanolithography, MEMS, and MOEMS",
issn = "1932-5150",
publisher = "SPIE",
number = "4",

}

Analysis and fabrication of reciprocal motors applied for microgyroscopes. / Tsai, Nan-Chyuan; Liou, Jiun Sheng; Lin, Chih Che; Li, Tuan.

In: Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 8, No. 4, 043046, 01.01.2009.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Analysis and fabrication of reciprocal motors applied for microgyroscopes

AU - Tsai, Nan-Chyuan

AU - Liou, Jiun Sheng

AU - Lin, Chih Che

AU - Li, Tuan

PY - 2009/1/1

Y1 - 2009/1/1

N2 - For microgyroscopes, the angular rate detection components have to oscillate forward and backward, alternatively. An innovative design of a microelectromagnetic drive module is proposed to make a II-type thin disk reciprocally and efficiently rotate within a certain of angular interval. Twelve electromagnetic (EM) poles, with iron cores at the center and wound by electroplated copper wires, enclosing the thin disk are designed to provide the magnetic drive power. An isotropic etching technique is employed to fabricate the high-aspect-ratio trench, housing of the follow-up electroplated copper, so that the contact angle of wire against the trench can be increased and the potential defect of cavities and pores within the wire can be prevented. On the other hand, a II-type thin disk, with a central bearing and a set of auxiliary bushings, is designed to conduct the pitch motion as an angular excitation, in addition to spinning, is exerted on the gyroscope. That is, the angular motion of the disk is two-dimensional: spinning, driven by the EM poles, and tilting, to respond to the exerted angular rate due to Coriolis effect. The efficacy of the micromagnetic drive module is verified by theoretical analysis and computer simulations by the commercial software, Ansoft Maxewll. In comparison to the conventional planar windings in microscale systems, the magnetic drive force is increased by 150%.

AB - For microgyroscopes, the angular rate detection components have to oscillate forward and backward, alternatively. An innovative design of a microelectromagnetic drive module is proposed to make a II-type thin disk reciprocally and efficiently rotate within a certain of angular interval. Twelve electromagnetic (EM) poles, with iron cores at the center and wound by electroplated copper wires, enclosing the thin disk are designed to provide the magnetic drive power. An isotropic etching technique is employed to fabricate the high-aspect-ratio trench, housing of the follow-up electroplated copper, so that the contact angle of wire against the trench can be increased and the potential defect of cavities and pores within the wire can be prevented. On the other hand, a II-type thin disk, with a central bearing and a set of auxiliary bushings, is designed to conduct the pitch motion as an angular excitation, in addition to spinning, is exerted on the gyroscope. That is, the angular motion of the disk is two-dimensional: spinning, driven by the EM poles, and tilting, to respond to the exerted angular rate due to Coriolis effect. The efficacy of the micromagnetic drive module is verified by theoretical analysis and computer simulations by the commercial software, Ansoft Maxewll. In comparison to the conventional planar windings in microscale systems, the magnetic drive force is increased by 150%.

UR - http://www.scopus.com/inward/record.url?scp=80055099167&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=80055099167&partnerID=8YFLogxK

U2 - 10.1117/1.3274611

DO - 10.1117/1.3274611

M3 - Article

AN - SCOPUS:80055099167

VL - 8

JO - Journal of Micro/ Nanolithography, MEMS, and MOEMS

JF - Journal of Micro/ Nanolithography, MEMS, and MOEMS

SN - 1932-5150

IS - 4

M1 - 043046

ER -