Analysis of aromatic volatiles utilizing a MEMS-based gas chromatography column

Yu Hao Su, Chia Yen Lee, Ruey Jen Yang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The purpose of this study is to propose and apply a MEMS-based gas chromatography (GC) device comprising a miniature serpentine column. A 2 m long, 200 μm wide and 250 μm deep column was fabricated using a wet etching process and bonded to a Pyrex cover plate. After the GC column was coated with Carbowax 20M as the stationary phase, the concentrations of benzene, toluene, Ethylbenzene and m-Xylene were successfully detected in the mixed sample. The leakage test and mixed gas separation test achieved a useful separation result for Ethylbenzene-Xylene and Benzene-Toluen mixture at a 17.1 cm/s linear flow rate in a GC chip column.

Original languageEnglish
Title of host publicationManufacturing Science and Technology
Pages2642-2646
Number of pages5
DOIs
Publication statusPublished - 2011
Event2011 International Conference on Advanced Engineering Materials and Technology, AEMT 2011 - Sanya, China
Duration: 2011 Jul 292011 Jul 31

Publication series

NameAdvanced Materials Research
Volume295-297
ISSN (Print)1022-6680

Other

Other2011 International Conference on Advanced Engineering Materials and Technology, AEMT 2011
CountryChina
CitySanya
Period11-07-2911-07-31

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Fingerprint Dive into the research topics of 'Analysis of aromatic volatiles utilizing a MEMS-based gas chromatography column'. Together they form a unique fingerprint.

Cite this