TY - GEN
T1 - Analysis of aromatic volatiles utilizing a MEMS-based gas chromatography column
AU - Su, Yu Hao
AU - Lee, Chia Yen
AU - Yang, Ruey Jen
N1 - Copyright:
Copyright 2011 Elsevier B.V., All rights reserved.
PY - 2011
Y1 - 2011
N2 - The purpose of this study is to propose and apply a MEMS-based gas chromatography (GC) device comprising a miniature serpentine column. A 2 m long, 200 μm wide and 250 μm deep column was fabricated using a wet etching process and bonded to a Pyrex cover plate. After the GC column was coated with Carbowax 20M as the stationary phase, the concentrations of benzene, toluene, Ethylbenzene and m-Xylene were successfully detected in the mixed sample. The leakage test and mixed gas separation test achieved a useful separation result for Ethylbenzene-Xylene and Benzene-Toluen mixture at a 17.1 cm/s linear flow rate in a GC chip column.
AB - The purpose of this study is to propose and apply a MEMS-based gas chromatography (GC) device comprising a miniature serpentine column. A 2 m long, 200 μm wide and 250 μm deep column was fabricated using a wet etching process and bonded to a Pyrex cover plate. After the GC column was coated with Carbowax 20M as the stationary phase, the concentrations of benzene, toluene, Ethylbenzene and m-Xylene were successfully detected in the mixed sample. The leakage test and mixed gas separation test achieved a useful separation result for Ethylbenzene-Xylene and Benzene-Toluen mixture at a 17.1 cm/s linear flow rate in a GC chip column.
UR - https://www.scopus.com/pages/publications/79960776923
UR - https://www.scopus.com/pages/publications/79960776923#tab=citedBy
U2 - 10.4028/www.scientific.net/AMR.295-297.2642
DO - 10.4028/www.scientific.net/AMR.295-297.2642
M3 - Conference contribution
AN - SCOPUS:79960776923
SN - 9783037851944
T3 - Advanced Materials Research
SP - 2642
EP - 2646
BT - Manufacturing Science and Technology
T2 - 2011 International Conference on Advanced Engineering Materials and Technology, AEMT 2011
Y2 - 29 July 2011 through 31 July 2011
ER -