Abstract
In this abstract, we describe studies of micro structure and micro motion in several microsystems using unique high speed x-ray imaging techniques. By way of illustration, we have imaged and measured steady state flow in micro pipes of various shapes and sizes using a high frame rate CCD camera. These experimental results were compared with macroscopic flow models. Also, new x-ray stroboscopic techniques have been developed which allow us to image periodic motion up to KHz rates. To demonstrate this new capability, we studied the dynamic response of a micro electromagnetic optical switch. Finally, we have applied x-ray microtomography in an investigation of the internal micro structure of inkjet print heads.
Original language | English |
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Pages | 149-150 |
Number of pages | 2 |
Publication status | Published - 1997 Jan 1 |
Event | Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2) - Chicago, IL, USA Duration: 1997 Jun 16 → 1997 Jun 19 |
Other
Other | Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2) |
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City | Chicago, IL, USA |
Period | 97-06-16 → 97-06-19 |
All Science Journal Classification (ASJC) codes
- Engineering(all)