Analysis of fluidic and mechanical motion in MEMS by using high speed X-ray micro-imaging techniques

Tzong-Shyng Leu, Ann Marie Lanzillotto, Michael Amabile, Richard Wildes

Research output: Contribution to conferencePaperpeer-review

6 Citations (Scopus)

Abstract

In this abstract, we describe studies of micro structure and micro motion in several microsystems using unique high speed x-ray imaging techniques. By way of illustration, we have imaged and measured steady state flow in micro pipes of various shapes and sizes using a high frame rate CCD camera. These experimental results were compared with macroscopic flow models. Also, new x-ray stroboscopic techniques have been developed which allow us to image periodic motion up to KHz rates. To demonstrate this new capability, we studied the dynamic response of a micro electromagnetic optical switch. Finally, we have applied x-ray microtomography in an investigation of the internal micro structure of inkjet print heads.

Original languageEnglish
Pages149-150
Number of pages2
Publication statusPublished - 1997 Jan 1
EventProceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2) - Chicago, IL, USA
Duration: 1997 Jun 161997 Jun 19

Other

OtherProceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2)
CityChicago, IL, USA
Period97-06-1697-06-19

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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