Analysis of high-voltage metal-oxide-semiconductor transistors with gradual junction in the drift region

Jone-Fang Chen, Teng Jen Ai, Yan Lin Tsai, Hao Tang Hsu, Chih Yuan Chen, Hann Ping Hwang

Research output: Contribution to journalArticlepeer-review

Abstract

The device characteristics and hot-carrier-induced degradation of high-voltage n-type metal-oxide-semiconductor transistors with traditional and gradual junctions in the drift region are studied in this work. The gradual junction used in this study is realized by self-aligned N - implantation through dual thicknesses of screen oxide during N - drift implantation. Compared with traditional devices, devices with gradual junctions have improved off-state breakdown voltage (V BD ) without sacrificing on-state driving current and hot-carrier-induced degradation. More improvement in V BD is observed if the dimensions of the device are larger. The mechanism responsible for V BD improvement in devices with gradual junctions is also investigated by using technology computer-aided-design simulations.

Original languageEnglish
Article number08PD04
JournalJapanese Journal of Applied Physics
Volume55
Issue number8S2
DOIs
Publication statusPublished - 2016 Jan 1

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

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